Qingqing Wang, Yun Zheng, Chonghao Zhai, Xudong Li, Qihuang Gong, Jianwei Wang. Chip-based quantum communications[J]. Journal of Semiconductors, 2021, 42(9): 091901. doi: 10.1088/1674-4926/42/9/091901.
Q Q Wang, Y Zheng, C H Zhai, X D Li, Q H Gong, J W Wang, Chip-based quantum communications[J]. J. Semicond., 2021, 42(9): 091901. doi: 10.1088/1674-4926/42/9/091901.
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Oxide semiconductor-based neuromorphic devices hold great potential for visual information processing, yet their performance is critically limited by photolithography-induced organic residues. This work systematically investigates the effects of photoresist contaminants on In-Ga-Zn-O thin-film transistors (IGZO TFTs), revealing that these residues introduce deep-level trap states that degrade both photo-responsivity and carrier transport dynamics. Through optimized plasma-assisted surface treatments, these adverse effects would be effectively eliminated. Additionally, we show that gate-voltage modulation can precisely control the relaxation kinetics of photocarriers in these devices. By applying these strategies to IGZO-based synaptic arrays, we achieve enhanced image contrast through controlled optoelectronic response modulation. Overall, our findings highlight the critical impact of photolithography-induced organic residues in IGZO optoelectronic synaptic devices and demonstrate an effective approach for performance enhancement through surface plasma treatment and gate-voltage modulation.