MEMS Shocking-Acceleration Switch with Threshold Modulating and On-State Latching Function

  • Graduate University of the Chinese Academy of Sciences,Shanghai 200050,China
  • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
  • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
  • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
  • State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

Key words: :MEMSshocking-acceleration switchthreshold adjusting functionlatching functionelectro-mechanical coupling principle

Abstract: Based on the electro-mechanical coupling principle,a shocking-acceleration switch with a threshold adjusting function is presented.The threshold acceleration is set by adjusting the bias voltage.Based on a theoretical analysis for an inertial step-signal,the transient response of the switch in terms of half-sinusoidal,pulsed,and stepped shocking acceleration is simulated using Coventor-Ware.The threshold of the switches ranges from 1000g to 5000g,and the response time is less than 60μs.A fabricated micro-switch array has been tested,resulting in satisfactory switching capability under shocking acceleration,which agrees well with the design.

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