J. Semicond. > Volume 32 > Issue 11 > Article Number: 115001

SOI-based radial-contour-mode micromechanical disk resonator

Jia Yingqian , Zhao Zhengping , Yang Yongjun , Hu Xiaodong and Li Qian

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Abstract: This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications. This disk resonator with a gold plated layer as the electrodes, was prepared on a silicon-on-insulator wafer, which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding. The gap between the disk and the surrounding gold electrodes is 100 nm. The radius of the disk is 20 μm and the thickness is 4.5 μm. In results, the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum.

Key words: RF-MEMS

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Jia Y Q, Zhao Z P, Yang Y J, Hu X D, Li Q. SOI-based radial-contour-mode micromechanical disk resonator[J]. J. Semicond., 2011, 32(11): 115001. doi: 10.1088/1674-4926/32/11/115001.

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History

Manuscript received: 20 August 2015 Manuscript revised: 19 May 2011 Online: Published: 01 November 2011

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