J. Semicond. > Volume 36 > Issue 6 > Article Number: 064009

Micro packaged MEMS pressure sensor for intracranial pressure measurement

Xiong Liu 1, , , Yan Yao 1, , Jiahao Ma 1, , Yanhang Zhang 2, , Qian Wang 2, , Zhaohua Zhang 1, and Tianling Ren 2,

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Abstract: This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Miniaturization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa.

Key words: intracranial pressure measurementlumbar puncture surgeryBioMEMSquad flat no-lead packagewaterproof test

Abstract: This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Miniaturization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa.

Key words: intracranial pressure measurementlumbar puncture surgeryBioMEMSquad flat no-lead packagewaterproof test



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Tofighi M R, Kawoos U, Neff S. Wireless intracranial pressure monitoring through scalp at microwave frequencies[J]. Electron Lett, 2006, 42(3): 148.

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[1]

Yang Yong. The progress of the intracranial pressure monitoring technology[J]. Chinese Journal of Minimally Invasive Neurosurgery, 2008, 13(6): 284.

[2]

Smith C S. Piezoresistance effect in germanium and silicon[J]. Phys Rev, 1954, 94: 42.

[3]

Velten T, Ruf H H, Barrow D. Packaging of bio-MEMS: strategies, technologies, and applications[J]. IEEE Trans Adv Packaging, 2005, 28(4): 533.

[4]

Xian Fei. QFN packaging components assembly technology research[J]. Electronic Components & Materials, 2005: 1001.

[5]

Zhang Yanhang, Zhang Zhaohua, Pang Bo. Tiny MEMS-based pressure sensors in the measurement of intracranial pressure[J]. Tsinghua Science and Technology, 2014, 19(2): 161.

[6]

Jiang Guangqiang. Design challenges of implantable pressure monitoring system[J]. Frontiers in Neuroscience.

[7]

Pang B, Zhang Z H, Ren T L. Simulation and design of micro pressure sensors applied to measure the intracranial pressure[J]. 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2013.

[8]

Sattayasoonthorn P, Suthakorn J, Chamnanvej S. LCP MEMS implantable pressure sensor for intracranial pressure measurement[J]. Proceedings of the 7th IEEE International Conference on Nano/Molecular Medicine and Engineering, Phuket, Thailand, 2013.

[9]

Kawoos U, Mugalodi G K, Tofighi M R. A permanently implantable intracranial pressure monitor[J]. Proc IEEE 31st Annual Northeast Bioengineering Conf, 2005: 17.

[10]

Tofighi M R, Kawoos U, Neff S. Wireless intracranial pressure monitoring through scalp at microwave frequencies[J]. Electron Lett, 2006, 42(3): 148.

[11]

Zhu Minghua, Yang Chengming, Zhou Lixia. Biological experiment study of medical silicone gels[J]. Beijing Biomedical Engineering, 1995, 14(2): 106.

[12]

Han R, Zhang Z, Ren T. Methods of superior design for the full scale output of piezoresistive pressure sensors[J]. Electrical Power Systems and Computers, 2011, 99: 55.

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X Liu, Y Yao, J H Ma, Y H Zhang, Q Wang, Z H Zhang, T L Ren. Micro packaged MEMS pressure sensor for intracranial pressure measurement[J]. J. Semicond., 2015, 36(6): 064009. doi: 10.1088/1674-4926/36/6/064009.

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Manuscript received: 17 November 2014 Manuscript revised: Online: Published: 01 June 2015

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