Chin. J. Semicond. > Volume 14 > Issue 1 > Article Number: 21

卧式MOCVD反应器内涡旋分布数值模拟

金希卓 , 丛志先 and 刘明登

+ Author Affiliations + Find other works by these authors

PDF

Abstract: 本文用有限元法,通过求解耦合的动量、能量微分方程组,对卧式冷壁MOCVD反应器内气体流动出现的涡旋分布进行了数值模拟,文中考虑了热浮力及反应器几何参数对涡旋分布的影响,同时讨论了涡旋发生与无量纲参数Gr、Re的比值Gr/Re~2的关系。计算结果表明,适当控制比值Gr/Re~2可以避免涡旋产生,从而为获得均匀生长速率提供了理论指导。本文的方法可用于类似地二维或轴对称流动涡旋分布的数值模拟。

Search

Advanced Search >>

Article Metrics

Article views: 1462 Times PDF downloads: 1104 Times Cited by: 0 Times

History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 January 1993

Email This Article

User name:
Email:*请输入正确邮箱
Code:*验证码错误