J. Semicond. > Volume 39 > Issue 8 > Article Number: 086001

The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures

Shaoxi Wang 1, 2, , , Dan Feng 1, , Chenxia Hu 3, and P. Rezai 2,

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Abstract: High aspect ratio units are necessary parts of complex microstructures in microfluidic devices. Some methods that are available to achieve a high aspect ratio require expensive materials or complex chemical processes; for other methods it is difficult to reach simple high aspect ratio structures, which need supporting structures. The paper presents a simple and cheap two-step Polydimethylsioxane (PDMS) transferring process to get high aspect ratio single pillars, which only requires covering the PDMS mold with a Brij@52 surface solution after getting a relative PDMS mold based on an SU8 mold. The experimental results demonstrate the method efficiency and effectiveness.

Key words: high aspectmicrofluidic chipmicrostructures

Abstract: High aspect ratio units are necessary parts of complex microstructures in microfluidic devices. Some methods that are available to achieve a high aspect ratio require expensive materials or complex chemical processes; for other methods it is difficult to reach simple high aspect ratio structures, which need supporting structures. The paper presents a simple and cheap two-step Polydimethylsioxane (PDMS) transferring process to get high aspect ratio single pillars, which only requires covering the PDMS mold with a Brij@52 surface solution after getting a relative PDMS mold based on an SU8 mold. The experimental results demonstrate the method efficiency and effectiveness.

Key words: high aspectmicrofluidic chipmicrostructures



References:

[1]

https://en.wikipedia.org/wiki/Polydimethylsiloxane

[2]

McDonald J C, Whitesides G M. Polydimethylsiloxane as a material for fabricating microfluidic devices. Acc Chem Res, 2002,35(7): 491

[3]

Friese C, Werber A, Krogmann F, et al. Materials effects and components for tunable micro-optics. IEEE Trans Electr Electron Eng, 2007 2(3): 232

[4]

Nguyen N T. Micro-optofluidic lenses: a review. Biomicrofluidics,2010,4(3): 031501.

[5]

Shao G C, Wu J H, Cai Z L, et al. Fabrication of elastomeric high-aspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique. Sens Actuators A, 2012, 178(5): 230

[6]

Lee T R, Chung K O, Chang Y S, et al. Resonant behavior and microfluidic manipulation of silicone cilia due to an added mass effect. Soft Matter, 2011, 7(9):4325

[7]

Sun M, Luo C, Xu L, et al. Artificial lotus leaf by nanocasting. Langmuir, 2005, 21(19): 8978

[8]

Gitlin L, Schulze P, Belder D. Rapid replication of master structures by double casting with PDMS. Lab on a Chip, 2009, 9(20):3000

[9]

Natarajan S, Chang-yen D A, Gale B L. Large-area, high aspect ratio SU-8 molds for the fabrication of PDMS microfluidic devices. J Micromechan Microeng, 2008, 18(4): 045021

[10]

Paek J, Kim J. Microsphere assisted fabrication of high aspect ratio elastomeric micropillars and waveguides. Nat Commun, 2014,5(5):3324

[11]

Sasoglu F M, Bohl A J, Layton B E. Design and microfabrication of a high aspect ratio PDMS microbeam array for parallel nanonewton force measurement and protein printing. J Micromechan Microeng, 2007, 17(3): 623

[12]

vanKan J A, Wang L P, Shao P G, et al. High aspect ratio PDMS replication through proton beam fabricated Ni masters. Nucl Instrum Methods Phys Res B, 2007, 260(1): 353

[13]

Sitti M. High aspect ratio polymer micro/nano-structure manufacturing using nanoembossing, nanomolding and directed self-assembly. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2003, 2(2): 886

[14]

Chandra D, Taylor J A, Yang S. Replica molding of high aspect ratio (sub-) micro hydrogel pillar arrays and their stability in air and solvents. Soft Matter, 2008, 4(5):979

[15]

Hung P J, Lee P J, Sabounchi P, et al. A novel high aspect ratio microfluidic degsin to provide a stable and uniform microenviroment for cell growth in a high throughput mammalian cell culture array. Lab on a Chip, 2005, 5:44

[16]

Kung Y C, Huang K W, Fan Y J, et al. Fabrication of 3D high aspect ratio PDMS microfluidic networks with a hybrid stamp. Lab on a Chip, 2015, 15(8):1861

[17]

Cusachs P R, Rico F, Martinez E, et al. Stability of microfabricated high aspect ratio structures in Poly(dimethylsiloxane). Langmuir, 2005, 21(12):5524

[18]

Sia S K, Whitesides G M. Microfluidic devices fabricated in poly (dimethylsiloxane) for biological studies. Electrophoresis, 2003, 24(21): 3563-3576.

[19]

McDonald J C, Whitesides G M. Poly (dimethylsiloxane) as a material for fabricating microfluidic devices. Acc Chem Res, 2002, 35(7): 491

[1]

https://en.wikipedia.org/wiki/Polydimethylsiloxane

[2]

McDonald J C, Whitesides G M. Polydimethylsiloxane as a material for fabricating microfluidic devices. Acc Chem Res, 2002,35(7): 491

[3]

Friese C, Werber A, Krogmann F, et al. Materials effects and components for tunable micro-optics. IEEE Trans Electr Electron Eng, 2007 2(3): 232

[4]

Nguyen N T. Micro-optofluidic lenses: a review. Biomicrofluidics,2010,4(3): 031501.

[5]

Shao G C, Wu J H, Cai Z L, et al. Fabrication of elastomeric high-aspect-ratio microstructures using polydimethylsiloxane (PDMS) double casting technique. Sens Actuators A, 2012, 178(5): 230

[6]

Lee T R, Chung K O, Chang Y S, et al. Resonant behavior and microfluidic manipulation of silicone cilia due to an added mass effect. Soft Matter, 2011, 7(9):4325

[7]

Sun M, Luo C, Xu L, et al. Artificial lotus leaf by nanocasting. Langmuir, 2005, 21(19): 8978

[8]

Gitlin L, Schulze P, Belder D. Rapid replication of master structures by double casting with PDMS. Lab on a Chip, 2009, 9(20):3000

[9]

Natarajan S, Chang-yen D A, Gale B L. Large-area, high aspect ratio SU-8 molds for the fabrication of PDMS microfluidic devices. J Micromechan Microeng, 2008, 18(4): 045021

[10]

Paek J, Kim J. Microsphere assisted fabrication of high aspect ratio elastomeric micropillars and waveguides. Nat Commun, 2014,5(5):3324

[11]

Sasoglu F M, Bohl A J, Layton B E. Design and microfabrication of a high aspect ratio PDMS microbeam array for parallel nanonewton force measurement and protein printing. J Micromechan Microeng, 2007, 17(3): 623

[12]

vanKan J A, Wang L P, Shao P G, et al. High aspect ratio PDMS replication through proton beam fabricated Ni masters. Nucl Instrum Methods Phys Res B, 2007, 260(1): 353

[13]

Sitti M. High aspect ratio polymer micro/nano-structure manufacturing using nanoembossing, nanomolding and directed self-assembly. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2003, 2(2): 886

[14]

Chandra D, Taylor J A, Yang S. Replica molding of high aspect ratio (sub-) micro hydrogel pillar arrays and their stability in air and solvents. Soft Matter, 2008, 4(5):979

[15]

Hung P J, Lee P J, Sabounchi P, et al. A novel high aspect ratio microfluidic degsin to provide a stable and uniform microenviroment for cell growth in a high throughput mammalian cell culture array. Lab on a Chip, 2005, 5:44

[16]

Kung Y C, Huang K W, Fan Y J, et al. Fabrication of 3D high aspect ratio PDMS microfluidic networks with a hybrid stamp. Lab on a Chip, 2015, 15(8):1861

[17]

Cusachs P R, Rico F, Martinez E, et al. Stability of microfabricated high aspect ratio structures in Poly(dimethylsiloxane). Langmuir, 2005, 21(12):5524

[18]

Sia S K, Whitesides G M. Microfluidic devices fabricated in poly (dimethylsiloxane) for biological studies. Electrophoresis, 2003, 24(21): 3563-3576.

[19]

McDonald J C, Whitesides G M. Poly (dimethylsiloxane) as a material for fabricating microfluidic devices. Acc Chem Res, 2002, 35(7): 491

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S X Wang, D Feng, C X Hu, P Rezai, The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures[J]. J. Semicond., 2018, 39(8): 086001. doi: 10.1088/1674-4926/39/8/086001.

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History

Manuscript received: 21 November 2017 Manuscript revised: 29 December 2017 Online: Accepted Manuscript: 11 May 2018 Uncorrected proof: 05 July 2018 Published: 09 August 2018

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