Chin. J. Semicond. > Volume 18 > Issue 2 > Article Number: 85

优化生长的In_xGa_(1-x)As缓冲层上双势垒In_yGa_(1-y)As/Al_zGa_(1-z)As/GaAs/Al_zGa_(1-z)As多量子阱应变状态测量

王小军 , 郑联喜 , 肖智博 , 王玉田 , 胡雄伟 and 王启明

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Abstract: 一种多步生长方法应用于GaAs衬底上的InxGa1-xAs缓冲层的MOCVD生长.在这种InxGa1-xAs缓冲层上生长的InyGa1-yAs/AlzGa1-zAs/GaAs/AlzGa1-xAs双垫垒量子阱材料表现出了很好的晶格特性和光学性质.超晶格的室温光伏谱中出现很强的22H高阶机制吸收峰,表明超晶格界面质量很好.主要应用X射线双晶衍射方法,给出了样品中各层的应变状态.据此,合理地解释了样品的光学测试结果.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 February 1997

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