Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon

Zhang Changsha; Zeng Xiangbo; Peng Wenbo; Shi Mingji; Liu Shiyong; Xiao Haibo; Wang Zhanguo; Chen Jun; Wang Shuangqing

doi:10.1088/1674-4926/30/8/083004

J. Semicond. > 2009, Volume 30 > Issue 8 > 083004

SEMICONDUCTOR MATERIALS

Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon

Zhang Changsha, Zeng Xiangbo, Peng Wenbo, Shi Mingji, Liu Shiyong, Xiao Haibo, Wang Zhanguo, Chen Jun and Wang Shuangqing

+ Author Affiliations

Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
National Laboratory for Molecular Sciences, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080, China
National Laboratory for Molecular Sciences, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080, China

DOI: 10.1088/1674-4926/30/8/083004

Abstract: Composites consisting of hydrogenated amorphous silicon (a-Si: H, inorganic) and zinc phthalocyanine (ZnPc, organic) were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (PECVD). The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si: Hfilm. Electron mobility-lifetime products µ_T of the composite film were increased by nearly one order of magnitude from 6.96 × 10^-7 to 5.08 ×
10^-6 cm²/V. Combined with photoconductivity spectra of the composites and pure a-Si:H, we tentatively elucidate the improvement in photoconductivity of the composite film.

Key words: zinc phthalocyanines

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Zhang Changsha, Zeng Xiangbo, Peng Wenbo, Shi Mingji, Liu Shiyong, Xiao Haibo, Wang Zhanguo, Chen Jun, Wang Shuangqing. Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon[J]. Journal of Semiconductors, 2009, 30(8): 083004. doi: 10.1088/1674-4926/30/8/083004

Zhang C S, Zeng X B, Peng W B, Shi M J, Liu S Y, Xiao H B, Wang Z G, Chen J, Wang S Q. Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon[J]. J. Semicond., 2009, 30(8): 083004. doi: 10.1088/1674-4926/30/8/083004.

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Received: 18 August 2015 Revised: 24 March 2009 Online: Published: 01 August 2009

Composites consisting of hydrogenated amorphous silicon (a-Si: H, inorganic) and zinc phthalocyanine (ZnPc, organic) were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (PECVD). The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si: Hfilm. Electron mobility-lifetime products µ_T of the composite film were increased by nearly one order of magnitude from 6.96 × 10^-7 to 5.08 ×
10^-6 cm²/V. Combined with photoconductivity spectra of the composites and pure a-Si:H, we tentatively elucidate the improvement in photoconductivity of the composite film.

Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon

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