Review Articles
Recent advances and future prospects in tactile sensors for normal and shear force detection, decoupling, and applications
Jinrong Huang, Yuchen Guo, Yongchang Jiang, Feiyu Wang, Lijia Pan, Yi Shi
J. Semicond.  2024, 45(11): -1--15  doi: 10.1088/1674-4926/24080006

Human skin, through its complex mechanoreceptor system, possesses the exceptional ability to finely perceive and differentiate multimodal mechanical stimuli, forming the biological foundation for dexterous manipulation, environmental exploration, and tactile perception. Tactile sensors that emulate this sensory capability, particularly in the detection, decoupling, and application of normal and shear forces, have made significant strides in recent years. This review comprehensively examines the latest research advancements in tactile sensors for normal and shear force sensing, delving into the design and decoupling methods of multi-unit structures, multilayer encapsulation structures, and bionic structures. It analyzes the advantages and disadvantages of various sensing principles, including piezoresistive, capacitive, and self-powered mechanisms, and evaluates their application potential in health monitoring, robotics, wearable devices, smart prosthetics, and human-machine interaction. By systematically summarizing current research progress and technical challenges, this review aims to provide forward-looking insights into future research directions, driving the development of electronic skin technology to ultimately achieve tactile perception capabilities comparable to human skin.

Human skin, through its complex mechanoreceptor system, possesses the exceptional ability to finely perceive and differentiate multimodal mechanical stimuli, forming the biological foundation for dexterous manipulation, environmental exploration, and tactile perception. Tactile sensors that emulate this sensory capability, particularly in the detection, decoupling, and application of normal and shear forces, have made significant strides in recent years. This review comprehensively examines the latest research advancements in tactile sensors for normal and shear force sensing, delving into the design and decoupling methods of multi-unit structures, multilayer encapsulation structures, and bionic structures. It analyzes the advantages and disadvantages of various sensing principles, including piezoresistive, capacitive, and self-powered mechanisms, and evaluates their application potential in health monitoring, robotics, wearable devices, smart prosthetics, and human-machine interaction. By systematically summarizing current research progress and technical challenges, this review aims to provide forward-looking insights into future research directions, driving the development of electronic skin technology to ultimately achieve tactile perception capabilities comparable to human skin.
Recent progress on stability and applications of flexible perovskite photodetectors
Ying Hu, Qianpeng Zhang, Junchao Han, Xinxin Lian, Hualiang Lv, Yu Pei, Siqing Shen, Yongli Liang, Hao Hu, Meng Chen, Xiaoliang Mo, Junhao Chu
J. Semicond.  2024, 45(11): -1--15  doi: 10.1088/1674-4926/24080019

Flexible photodetectors have garnered significant attention by virtue of their potential applications in environmental monitoring, wearable healthcare, imaging sensing, and portable optical communications. Perovskites stand out as particularly promising materials for photodetectors, offering exceptional optoelectronic properties, tunable band gaps, low-temperature solution processing, and notable mechanical flexibility. In this review, we explore the latest progress in flexible perovskite photodetectors, emphasizing the strategies developed for photoactive materials and device structures to enhance optoelectronic performance and stability. Additionally, we discuss typical applications of these devices and offer insights into future directions and potential applications.

Flexible photodetectors have garnered significant attention by virtue of their potential applications in environmental monitoring, wearable healthcare, imaging sensing, and portable optical communications. Perovskites stand out as particularly promising materials for photodetectors, offering exceptional optoelectronic properties, tunable band gaps, low-temperature solution processing, and notable mechanical flexibility. In this review, we explore the latest progress in flexible perovskite photodetectors, emphasizing the strategies developed for photoactive materials and device structures to enhance optoelectronic performance and stability. Additionally, we discuss typical applications of these devices and offer insights into future directions and potential applications.
Recent developments in superjunction power devices
Chao Ma, Weizhong Chen, Teng Liu, Wentong Zhang, Bo Zhang
J. Semicond.  2024, 45(11): 111301  doi: 10.1088/1674-4926/24050003

Superjunction (SJ) is one of the most innovative concepts in the field of power semiconductor devices and is often referred to as a "milestone" in power MOS. Its balanced charge field modulation mechanism breaks through the strong dependency between the doping concentration in the drift region and the breakdown voltage VB in conventional devices. This results in a reduction of the trade-off relationship between specific on-resistance Ron,sp and VB from the conventional Ron,spVB2.5 to Ron,spWVB1.32, and even to Ron,spW·VB1.03. As the exponential term coefficient decreases, Ron,sp decreases with the cell width W, exhibiting a development pattern reminiscent of "Moore’s Law". This paper provides an overview of the latest research developments in SJ power semiconductor devices. Firstly, it introduces the minimum specific on-resistance Ron,min theory of SJ devices, along with its combination with special effects like 3-D depletion and tunneling, discussing the development of Ron,min theory in the wide bandgap SJ field. Subsequently, it discusses the latest advancements in silicon-based and wide bandgap SJ power devices. Finally, it introduces the homogenization field (HOF) and high-K voltage-sustaining layers derived from the concept of SJ charge balance. SJ has made significant progress in device performance, reliability, and integration, and in the future, it will continue to evolve through deeper integration with different materials, processes, and packaging technologies, enhancing the overall performance of semiconductor power devices.

Superjunction (SJ) is one of the most innovative concepts in the field of power semiconductor devices and is often referred to as a "milestone" in power MOS. Its balanced charge field modulation mechanism breaks through the strong dependency between the doping concentration in the drift region and the breakdown voltage VB in conventional devices. This results in a reduction of the trade-off relationship between specific on-resistance Ron,sp and VB from the conventional Ron,spVB2.5 to Ron,spWVB1.32, and even to Ron,spW·VB1.03. As the exponential term coefficient decreases, Ron,sp decreases with the cell width W, exhibiting a development pattern reminiscent of "Moore’s Law". This paper provides an overview of the latest research developments in SJ power semiconductor devices. Firstly, it introduces the minimum specific on-resistance Ron,min theory of SJ devices, along with its combination with special effects like 3-D depletion and tunneling, discussing the development of Ron,min theory in the wide bandgap SJ field. Subsequently, it discusses the latest advancements in silicon-based and wide bandgap SJ power devices. Finally, it introduces the homogenization field (HOF) and high-K voltage-sustaining layers derived from the concept of SJ charge balance. SJ has made significant progress in device performance, reliability, and integration, and in the future, it will continue to evolve through deeper integration with different materials, processes, and packaging technologies, enhancing the overall performance of semiconductor power devices.
Chalcogenide perovskites—challenges, status, and future prospects
Pidugu Kesavan Kannan, Mariappan Anandkumar, Gopal Bhavani
J. Semicond.  2024, 45(11): 111801  doi: 10.1088/1674-4926/24050029

Perovskites dominate the photovoltaic research community over the last two decades due to its very high absorption coefficient, electron and hole mobility. However, most of the reported solar cells constitute organic perovskites which offer very high efficiency but are highly unstable. Chalcogenide perovskites like BaZrS3, CaZrS3, etc. promise to be a perfect alternate owing to its high stability and mobilities. But, till now no stable photovoltaic device has been successfully fabricated using these materials and the existing challenges present in the synthesis of such perovskites are discussed. Also, the basic thermodynamic aspects that are essential for formation of BaZrS3 are discussed. An extensive review on the precedent literatures and the future direction in the BaZrS3 photovoltaic device research is clearly given.

Perovskites dominate the photovoltaic research community over the last two decades due to its very high absorption coefficient, electron and hole mobility. However, most of the reported solar cells constitute organic perovskites which offer very high efficiency but are highly unstable. Chalcogenide perovskites like BaZrS3, CaZrS3, etc. promise to be a perfect alternate owing to its high stability and mobilities. But, till now no stable photovoltaic device has been successfully fabricated using these materials and the existing challenges present in the synthesis of such perovskites are discussed. Also, the basic thermodynamic aspects that are essential for formation of BaZrS3 are discussed. An extensive review on the precedent literatures and the future direction in the BaZrS3 photovoltaic device research is clearly given.
A review of ToF-based LiDAR
Jie Ma, Shenglong Zhuo, Lei Qiu, Yuzhu Gao, Yifan Wu, Ming Zhong, Rui Bai, Miao Sun, Patrick Yin Chiang
J. Semicond.  2024, 45(10): 101201  doi: 10.1088/1674-4926/24040015

In recent years, propelled by the rapid iterative advancements in digital imaging technology and the semiconductor industry, encompassing microelectronic design, manufacturing, packaging, and testing, time-of-flight (ToF)-based imaging systems for acquiring depth information have garnered considerable attention from both academia and industry. This technology has emerged as a focal point of research within the realm of 3D imaging. Owing to its relatively straightforward principles and exceptional performance, ToF technology finds extensive applications across various domains including human−computer interaction, autonomous driving, industrial inspection, medical and healthcare, augmented reality, smart homes, and 3D reconstruction, among others. Notably, the increasing maturity of ToF-based LiDAR systems is evident in current developments. This paper comprehensively reviews the fundamental principles of ToF technology and LiDAR systems, alongside recent research advancements. It elucidates the innovative aspects and technical challenges encountered in both transmitter (TX) and receiver (RX), providing detailed discussions on corresponding solutions. Furthermore, the paper explores prospective avenues for future research, offering valuable insights for subsequent investigations.

In recent years, propelled by the rapid iterative advancements in digital imaging technology and the semiconductor industry, encompassing microelectronic design, manufacturing, packaging, and testing, time-of-flight (ToF)-based imaging systems for acquiring depth information have garnered considerable attention from both academia and industry. This technology has emerged as a focal point of research within the realm of 3D imaging. Owing to its relatively straightforward principles and exceptional performance, ToF technology finds extensive applications across various domains including human−computer interaction, autonomous driving, industrial inspection, medical and healthcare, augmented reality, smart homes, and 3D reconstruction, among others. Notably, the increasing maturity of ToF-based LiDAR systems is evident in current developments. This paper comprehensively reviews the fundamental principles of ToF technology and LiDAR systems, alongside recent research advancements. It elucidates the innovative aspects and technical challenges encountered in both transmitter (TX) and receiver (RX), providing detailed discussions on corresponding solutions. Furthermore, the paper explores prospective avenues for future research, offering valuable insights for subsequent investigations.
The exchange interaction between neighboring quantum dots: physics and applications in quantum information processing
Zheng Zhou, Yixin Li, Zhiyuan Wu, Xinping Ma, Shichang Fan, Shaoyun Huang
J. Semicond.  2024, 45(10): 101701  doi: 10.1088/1674-4926/24050043

Electron spins confined in semiconductor quantum dots (QDs) are one of potential candidates for physical implementation of scalable quantum information processing technologies. Tunnel coupling based inter exchange interaction between QDs is crucial in achieving single-qubit manipulation, two-qubit gate, quantum communication and quantum simulation. This review first provides a theoretical perspective that surveys a general framework, including the Helter−London approach, the Hund−Mulliken approach, and the Hubbard model, to describe the inter exchange interactions between semiconductor quantum dots. An electrical method to control the inter exchange interaction in a realistic device is proposed as well. Then the significant achievements of inter exchange interaction in manipulating single qubits, achieving two-qubit gates, performing quantum communication and quantum simulation are reviewed. The last part is a summary of this review.

Electron spins confined in semiconductor quantum dots (QDs) are one of potential candidates for physical implementation of scalable quantum information processing technologies. Tunnel coupling based inter exchange interaction between QDs is crucial in achieving single-qubit manipulation, two-qubit gate, quantum communication and quantum simulation. This review first provides a theoretical perspective that surveys a general framework, including the Helter−London approach, the Hund−Mulliken approach, and the Hubbard model, to describe the inter exchange interactions between semiconductor quantum dots. An electrical method to control the inter exchange interaction in a realistic device is proposed as well. Then the significant achievements of inter exchange interaction in manipulating single qubits, achieving two-qubit gates, performing quantum communication and quantum simulation are reviewed. The last part is a summary of this review.
Recent progress on fabrication, spectroscopy properties, and device applications in Sn-doped CdS micro-nano structures
Bo Cao, Ye Tian, Huan Fei Wen, Hao Guo, Xiaoyu Wu, Liangjie Li, Zhenrong Zhang, Lai Liu, Qiang Zhu, Jun Tang, Jun Liu
J. Semicond.  2024, 45(9): 091101  doi: 10.1088/1674-4926/24040041

One-dimensional semiconductor materials possess excellent photoelectric properties and potential for the construction of integrated nanodevices. Among them, Sn-doped CdS has different micro-nano structures, including nanoribbons, nanowires, comb-like structures, and superlattices, with rich optical microcavity modes, excellent optical properties, and a wide range of application fields. This article reviews the research progress of various micrometer structures of Sn-doped CdS, systematically elaborates the effects of different growth conditions on the preparation of Sn-doped CdS micro-nano structures, as well as the spectral characteristics of these structures and their potential applications in certain fields. With the continuous progress of nanotechnology, it is expected that Sn-doped CdS micro-nano structures will achieve more breakthroughs in the field of optoelectronics and form cross-integration with other fields, jointly promoting scientific, technological, and social development.

One-dimensional semiconductor materials possess excellent photoelectric properties and potential for the construction of integrated nanodevices. Among them, Sn-doped CdS has different micro-nano structures, including nanoribbons, nanowires, comb-like structures, and superlattices, with rich optical microcavity modes, excellent optical properties, and a wide range of application fields. This article reviews the research progress of various micrometer structures of Sn-doped CdS, systematically elaborates the effects of different growth conditions on the preparation of Sn-doped CdS micro-nano structures, as well as the spectral characteristics of these structures and their potential applications in certain fields. With the continuous progress of nanotechnology, it is expected that Sn-doped CdS micro-nano structures will achieve more breakthroughs in the field of optoelectronics and form cross-integration with other fields, jointly promoting scientific, technological, and social development.
Review of the SiC LDMOS power device
Ziwei Hu, Jiafei Yao, Ang Li, Qi Sun, Man Li, Kemeng Yang, Jun Zhang, Jing Chen, Maolin Zhang, Yufeng Guo
J. Semicond.  2024, 45(8): 081501  doi: 10.1088/1674-4926/24010029

Silicon carbide (SiC), as a third-generation semiconductor material, possesses exceptional material properties that significantly enhance the performance of power devices. The SiC lateral double-diffused metal–oxide–semiconductor (LDMOS) power devices have undergone continuous optimization, resulting in an increase in breakdown voltage (BV) and ultra-low specific on-resistance (Ron,sp). This paper has summarized the structural optimizations and experimental progress of SiC LDMOS power devices, including the trench-gate technology, reduced surface field (RESURF) technology, doping technology, junction termination techniques and so on. The paper is aimed at enhancing the understanding of the operational mechanisms and providing guidelines for the further development of SiC LDMOS power devices.

Silicon carbide (SiC), as a third-generation semiconductor material, possesses exceptional material properties that significantly enhance the performance of power devices. The SiC lateral double-diffused metal–oxide–semiconductor (LDMOS) power devices have undergone continuous optimization, resulting in an increase in breakdown voltage (BV) and ultra-low specific on-resistance (Ron,sp). This paper has summarized the structural optimizations and experimental progress of SiC LDMOS power devices, including the trench-gate technology, reduced surface field (RESURF) technology, doping technology, junction termination techniques and so on. The paper is aimed at enhancing the understanding of the operational mechanisms and providing guidelines for the further development of SiC LDMOS power devices.
High-precision X-ray characterization for basic materials in modern high-end integrated circuit
Weiran Zhao, Qiuqi Mo, Li Zheng, Zhongliang Li, Xiaowei Zhang, Yuehui Yu
J. Semicond.  2024, 45(7): 071101  doi: 10.1088/1674-4926/24030016

Semiconductor materials exemplify humanity's unwavering pursuit of enhanced performance, efficiency, and functionality in electronic devices. From its early iterations to the advanced variants of today, this field has undergone an extraordinary evolution. As the reliability requirements of integrated circuits continue to increase, the industry is placing greater emphasis on the crystal qualities. Consequently, conducting a range of characterization tests on the crystals has become necessary. This paper will examine the correlation between crystal quality, device performance, and production yield, emphasizing the significance of crystal characterization tests and the important role of high-precision synchrotron radiation X-ray topography characterization in semiconductor analysis. Finally, we will cover the specific applications of synchrotron radiation characterization in the development of semiconductor materials.

Semiconductor materials exemplify humanity's unwavering pursuit of enhanced performance, efficiency, and functionality in electronic devices. From its early iterations to the advanced variants of today, this field has undergone an extraordinary evolution. As the reliability requirements of integrated circuits continue to increase, the industry is placing greater emphasis on the crystal qualities. Consequently, conducting a range of characterization tests on the crystals has become necessary. This paper will examine the correlation between crystal quality, device performance, and production yield, emphasizing the significance of crystal characterization tests and the important role of high-precision synchrotron radiation X-ray topography characterization in semiconductor analysis. Finally, we will cover the specific applications of synchrotron radiation characterization in the development of semiconductor materials.
Neuromorphic circuits based on memristors: endowing robots with a human-like brain
Xuemei Wang, Fan Yang, Qing Liu, Zien Zhang, Zhixing Wen, Jiangang Chen, Qirui Zhang, Cheng Wang, Ge Wang, Fucai Liu
J. Semicond.  2024, 45(6): 061301  doi: 10.1088/1674-4926/23120037

Robots are widely used, providing significant convenience in daily life and production. With the rapid development of artificial intelligence and neuromorphic computing in recent years, the realization of more intelligent robots through a profound intersection of neuroscience and robotics has received much attention. Neuromorphic circuits based on memristors used to construct hardware neural networks have proved to be a promising solution of shattering traditional control limitations in the field of robot control, showcasing characteristics that enhance robot intelligence, speed, and energy efficiency. Starting with introducing the working mechanism of memristors and peripheral circuit design, this review gives a comprehensive analysis on the biomimetic information processing and biomimetic driving operations achieved through the utilization of neuromorphic circuits in brain-like control. Four hardware neural network approaches, including digital-analog hybrid circuit design, novel device structure design, multi-regulation mechanism, and crossbar array, are summarized, which can well simulate the motor decision-making mechanism, multi-information integration and parallel control of brain at the hardware level. It will be definitely conductive to promote the application of memristor-based neuromorphic circuits in areas such as intelligent robotics, artificial intelligence, and neural computing. Finally, a conclusion and future prospects are discussed.

Robots are widely used, providing significant convenience in daily life and production. With the rapid development of artificial intelligence and neuromorphic computing in recent years, the realization of more intelligent robots through a profound intersection of neuroscience and robotics has received much attention. Neuromorphic circuits based on memristors used to construct hardware neural networks have proved to be a promising solution of shattering traditional control limitations in the field of robot control, showcasing characteristics that enhance robot intelligence, speed, and energy efficiency. Starting with introducing the working mechanism of memristors and peripheral circuit design, this review gives a comprehensive analysis on the biomimetic information processing and biomimetic driving operations achieved through the utilization of neuromorphic circuits in brain-like control. Four hardware neural network approaches, including digital-analog hybrid circuit design, novel device structure design, multi-regulation mechanism, and crossbar array, are summarized, which can well simulate the motor decision-making mechanism, multi-information integration and parallel control of brain at the hardware level. It will be definitely conductive to promote the application of memristor-based neuromorphic circuits in areas such as intelligent robotics, artificial intelligence, and neural computing. Finally, a conclusion and future prospects are discussed.
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