J. Semicond. > 2010, Volume 31 > Issue 11 > 114002
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SEMICONDUCTOR DEVICES

Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors

Fakhra Aziz, M. H. Sayyad, Khassan S. Karimov, M. Saleem, Zubair Ahmad and S. Mahmood Khan

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DOI: 10.1088/1674-4926/31/11/114002

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Abstract: This study presents the fabrication and characterization of novel surface-type capacitive humidity sensors using vanadyl phthalocyanine (VOPc) as the active material. The devices, which comprise three different thicknesses, have been fabricated using a thermal evaporator. A thin film of VOPc is deposited on thoroughly cleaned glass substrates with pre-patterned Ag electrodes. The capacitive effect of the samples under humidity has been investigated. Comparison of the samples with different thicknesses shows that the thinnest device seems more sensitive towards humidity. The humidity dependent capacitance properties of the sensor make it beneficial for use in commercial hygrometers.

Key words: surface-type, capacitance, vanadyl phthalocyanine, humidity sensor, organic semiconductor.

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    Received: 18 August 2015 Revised: 30 June 2010 Online: Published: 01 November 2010

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      Article Navigation >  Journal of Semiconductors  > 2010  >  31(11): 114002
      Fakhra Aziz, M. H. Sayyad, Khassan S. Karimov, M. Saleem, Zubair Ahmad, S. Mahmood Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. Journal of Semiconductors, 2010, 31(11): 114002. doi: 10.1088/1674-4926/31/11/114002 ****F Aziz, M H Sayyad, K S Karimov, M Saleem, Z Ahmad, S M Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. J. Semicond., 2010, 31(11): 114002. doi:  10.1088/1674-4926/31/11/114002.
      Citation:
      Fakhra Aziz, M. H. Sayyad, Khassan S. Karimov, M. Saleem, Zubair Ahmad, S. Mahmood Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. Journal of Semiconductors, 2010, 31(11): 114002. doi: 10.1088/1674-4926/31/11/114002 ****
      F Aziz, M H Sayyad, K S Karimov, M Saleem, Z Ahmad, S M Khan. Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors[J]. J. Semicond., 2010, 31(11): 114002. doi:  10.1088/1674-4926/31/11/114002.
      shu

      Characterization of vanadyl phthalocyanine based surface-type capacitive humidity sensors

      DOI: 10.1088/1674-4926/31/11/114002

      • Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi-23640, Pakistan

      • Low Dimensional Material Research Center, Department of Physics, University of Malaya, 50603 Kuala Lumpur, Malaysia

      • Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi-23640, Pakistan

      • Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi-23640, Pakistan

      • Physical Technical Institute, Aini St-299/1, Dushanbe, 734063, Tajikistan

      • Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi-23640, Pakistan

      • Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi-23640, Pakistan

      • Department of Mechanical Engineering, 20 Symonds Street Auckland, University of Auckland, New Zealand

      • Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi-23640, Pakistan

      • Received Date: 2015-08-18
      • Accepted Date: 2010-03-31
      • Revised Date: 2010-06-30
      • Published Date: 2010-10-31

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