J. Semicond. > 2010, Volume 31 > Issue 8 > 084010
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SEMICONDUCTOR DEVICES

Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16

Lei Tingping, Shi Yunbo, Lü Wenlong, Liu Yang, Tao Wei, Yuan Pengliang, Lin Liwei, Sun Daoheng and Wang Liquan

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DOI: 10.1088/1674-4926/31/8/084010

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Abstract: PANI/ZnPcCl16 (polyaniline doped with sulfosalicylic acid/hexadecachloro zinc phthalocyanine) powders were vacuum co-deposited onto Si substrates, where Pt interdigitated electrodes were made by micromachining. The PANI/ZnPcCl16 films were characterized and analyzed by SEM, and the influencing factors on its intrinsic performance were analyzed and sensitivities of the sensors were investigated by exposure to chlorine (Cl2) gas. The results showed that powders prepared with a stoichiometric ratio of (ZnPcCl16)0.6(PANI)0.4 had a preferential sensitivity to Cl2 gas, superior to those prepared otherwise; the optimal vacuum co-deposition conditions for the films are a substrate temperature of 160 ℃, an evaporation temperature of 425 ℃ and a film thickness of 75 nm; elevating the operation temperature (above 100 ℃) or increasing the gas concentration (over 100 ppm) would improve the response characteristics, but there should be upper levels for each. Finally, the gas sensing mechanism of PANI/ZnPcCl16 films was also discussed.

Key words: PANI/ZnPcCl16, hybrid organic semiconductors, chlorine gas sensors, vacuum co-deposition

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    Received: 18 August 2015 Revised: 07 April 2010 Online: Published: 01 August 2010

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      Article Navigation >  Journal of Semiconductors  > 2010  >  31(8): 084010
      Lei Tingping, Shi Yunbo, Lü Wenlong, Liu Yang, Tao Wei, Yuan Pengliang, Lin Liwei, Sun Daoheng, Wang Liquan. Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16[J]. Journal of Semiconductors, 2010, 31(8): 084010. doi: 10.1088/1674-4926/31/8/084010 ****Lei T P, Shi Y B, Lü W, Liu Y, Tao W, Yuan P L, Lin L W, Sun D H, Wang L Q. Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16[J]. J. Semicond., 2010, 31(8): 084010. doi: 10.1088/1674-4926/31/8/084010.
      Citation:
      Lei Tingping, Shi Yunbo, Lü Wenlong, Liu Yang, Tao Wei, Yuan Pengliang, Lin Liwei, Sun Daoheng, Wang Liquan. Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16[J]. Journal of Semiconductors, 2010, 31(8): 084010. doi: 10.1088/1674-4926/31/8/084010 ****
      Lei T P, Shi Y B, Lü W, Liu Y, Tao W, Yuan P L, Lin L W, Sun D H, Wang L Q. Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16[J]. J. Semicond., 2010, 31(8): 084010. doi: 10.1088/1674-4926/31/8/084010.
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      Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl16

      DOI: 10.1088/1674-4926/31/8/084010

      • College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China

      • Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China

      • Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, School of Measurement Control

      • College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China

      • College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China

      • College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China

      • Qingyang Secondary Specialized School of Science and Technology, Qingyang 745000, China

      • Department of Mechanical Engineering and Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720, USA

      • College of Physics and Mechanical & Electrical Engineering, Xiamen University, Xiamen 361005, China

      • Mechanical Engineering Center for Post-doctoral Studies, Harbin Engineering University, Harbin 150001, China

      • Received Date: 2015-08-18
      • Accepted Date: 2010-01-21
      • Revised Date: 2010-04-07
      • Published Date: 2010-07-31

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