Design and fabrication of a micro electromagnetic vibration energy harvester

Wang Peng; Li Wei; Che Lufeng

doi:10.1088/1674-4926/32/10/104009

J. Semicond. > 2011, Volume 32 > Issue 10 > 104009

SEMICONDUCTOR DEVICES

Design and fabrication of a micro electromagnetic vibration energy harvester

Wang Peng, Li Wei and Che Lufeng

+ Author Affiliations

DOI: 10.1088/1674-4926/32/10/104009

Abstract: This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power. It mainly consists of folded beams, a permanent magnet and copper planar coils. The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils. A prototype has been fabricated using MEMS micromachining technology. The testing results show that at the resonant frequency of 242 Hz, the prototype can generate 0.55 μW of maximal output power with peak-peak voltage of 28 mV for 0.5g (g = 9.8 m/s²⁾ external acceleration.

Key words: electromagnetic energy harvester

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Received: 20 August 2015 Revised: 10 May 2011 Online: Published: 01 October 2011

This paper presents a new micro electromagnetic energy harvester that can convert transverse vibration energy to electrical power. It mainly consists of folded beams, a permanent magnet and copper planar coils. The calculated value of the natural frequency is 274 Hz and electromagnetic simulation shows that the magnetic flux density will decrease sharply with increasing space between the magnet and coils. A prototype has been fabricated using MEMS micromachining technology. The testing results show that at the resonant frequency of 242 Hz, the prototype can generate 0.55 μW of maximal output power with peak-peak voltage of 28 mV for 0.5g (g = 9.8 m/s²⁾ external acceleration.

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