J. Semicond. > 2011, Volume 32 > Issue 6 > 064008
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SEMICONDUCTOR DEVICES

Porous waveguide facilitated low divergence quantum cascade laser

Yin Wen, Lu Quanyong, Liu Wanfeng, Zhang Jinchuan, Wang Lijun, Liu Junqi, Li Lu, Liu Fengqi and Wang Zhanguo

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DOI: 10.1088/1674-4926/32/6/064008

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Abstract: A quantum cascade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branch-like porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9o.

Key words: quantum cascade laser

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    Received: 18 August 2015 Revised: 20 December 2010 Online: Published: 01 June 2011

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      Article Navigation >  Journal of Semiconductors  > 2011  >  32(6): 064008
      Yin Wen, Lu Quanyong, Liu Wanfeng, Zhang Jinchuan, Wang Lijun, Liu Junqi, Li Lu, Liu Fengqi, Wang Zhanguo. Porous waveguide facilitated low divergence quantum cascade laser[J]. Journal of Semiconductors, 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008 ****Yin W, Lu Q Y, Liu W F, Zhang J C, Wang L J, Liu J Q, Li L, Liu F Q, Wang Z G. Porous waveguide facilitated low divergence quantum cascade laser[J]. J. Semicond., 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008.
      Citation:
      Yin Wen, Lu Quanyong, Liu Wanfeng, Zhang Jinchuan, Wang Lijun, Liu Junqi, Li Lu, Liu Fengqi, Wang Zhanguo. Porous waveguide facilitated low divergence quantum cascade laser[J]. Journal of Semiconductors, 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008 ****
      Yin W, Lu Q Y, Liu W F, Zhang J C, Wang L J, Liu J Q, Li L, Liu F Q, Wang Z G. Porous waveguide facilitated low divergence quantum cascade laser[J]. J. Semicond., 2011, 32(6): 064008. doi: 10.1088/1674-4926/32/6/064008.
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      Porous waveguide facilitated low divergence quantum cascade laser

      DOI: 10.1088/1674-4926/32/6/064008

      • Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China and Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

      • Received Date: 2015-08-18
      • Accepted Date: 2010-11-22
      • Revised Date: 2010-12-20
      • Published Date: 2011-05-23

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