Abstract: In this paper, novel nanoscale MOSFET with Source/Drain-to-Gate Non-overlapped and high-k spacer structure has been demonstrated to reduce the gate leakage current for the first time. The gate leakage behaviour of novel MOSFET structure has been investigated with help of compact analytical model and Sentaurus Simulation. Fringing gate electric field through the dielectric spacer induces inversion layer in the non-overlap region to act as extended S/D region. It is found that optimal Source/Drain-to-Gate Non-overlapped and high-k spacer structure has reduced the gate leakage current to great extent as compared to those of an overlapped structure. Further, the proposed structure had improved off current, subthreshold slope and DIBL characteristic. It is concluded that this structure solves the problem of high leakage current without introducing the extra series resistance.

Key words: Gate tunneling current, analytical model, spacer dielectrics, DIBL, subthreshold slope.