| Citation: |
Zhang Zuwei, Wen Zhiyu, Shang Zhengguo, Li Dongling, Hu Jing. Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. Journal of Semiconductors, 2012, 33(9): 094009. doi: 10.1088/1674-4926/33/9/094009
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Zhang Z W, Wen Z Y, Shang Z G, Li D L, Hu J. Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. J. Semicond., 2012, 33(9): 094009. doi: 10.1088/1674-4926/33/9/094009.
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Design and process test of a novel MOEMS accelerometer based on Raman-Nath diffraction
DOI: 10.1088/1674-4926/33/9/094009
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Abstract
A novel micro-opto-electro-mechanical system (MOEMS) accelerometer based on Raman-Nath diffraction is presented. It mainly consists of an FPW delay line oscillator and optical strip waveguides. The fundamental theories and principles of the device are introduced briefly. A flexural plate-wave delay-line oscillator is designed to work as an acousto-optic (AO) shifter, which has a Klein-Cook parameter of 0.38. Single-mode optical strip waveguides of 2 μm in width and thicknesses of 0.6 μm are designed by using the effective index method for light transmission. The E00y mode waveguide polarizers are designed to ensure the consistency of the light polarization in the waveguides. The fabrication process, based on (100) oriented, 450-μm-thick silicon wafers is proposed in detail, and some difficulties in the process are discussed carefully. At last, a series of process tests are undertaken to solve the proposed problems. The results indicate that the proposed design and fabrication process of the device is dependable and realizable.-
Keywords:
- accelerometer
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References
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