J. Semicond. > 2013, Volume 34 > Issue 12 > 125009
|

SEMICONDUCTOR INTEGRATED CIRCUITS

A low-noise high-linearity interface ASIC for MEMS gyroscopes

Ran Fang, Wengao Lu, Guannan Wang, Tingting Tao, Yacong Zhang, Zhongjian Chen and Dunshan Yu

+ Author Affiliations

 Corresponding author: Lu Wengao, wglu@pku.edu.cn

DOI: 10.1088/1674-4926/34/12/125009

PDF

Abstract: This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes. A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise. In order to cancel the effect caused by the gyroscope capacitive mismatch, a mismatch auto-compensation circuit is implemented. The gain and phase shift of the drive closed loop is controlled separately by an auto gain controller and an adjustable phase shifter. The chip is fabricated in a 0.35 μm CMOS process. The test of the chip is performed with a vibratory gyroscope, and the measurement shows that the noise floor is 0.003°/s/$\sqrt {{\rm{Hz}}}$, and the measured drift stability is 43°/h. Within -300 to 300°/s of rotation rate input range, the non-linearity is less than 0.1%.

Key words: capacitive interface circuit, MEMS gyroscope, low noise, ASIC



[1]
Dong L, Avanesian D. Drive-mode control for vibrational MEMS gyroscopes. IEEE Trans Industrial Electron, 2009, 56(4):956 doi: 10.1109/TIE.2008.2010088
[2]
Sharma A, Zaman M F, Ayazi F. A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes. IEEE J Solid-State Circuits, 2007, 42(8):1790 doi: 10.1109/JSSC.2007.900282
[3]
Aaltonen L, Halonen K. Pseudo-continuous-time teadout circuit for a 300°/s capacitive 2-axis micro-gyroscope. IEEE J Solid-State Circuits, 2009, 44(12):3609 doi: 10.1109/JSSC.2009.2035554
[4]
Qu H, Fang D, Xie H K. A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise, low-power dual-chopper amplifier. IEEE J Sensors, 2008, 8(9):1511 doi: 10.1109/JSEN.2008.923582
[5]
Mikko S, Lasse A, Teemu S. Interface and control electronics for a bulk micromachined capacitive gyroscope. Sensors and Actuators A:Physical, 2008, 147:183 doi: 10.1016/j.sna.2008.03.023
[6]
Cui J, Guo Z, Zhao Q. Force rebalance controller synthesis for a micromachined vibratory gyroscope based on sensitivity margin specifications. J Microelectromechan Syst, 2011, 20(6):1382 doi: 10.1109/JMEMS.2011.2167663
[7]
Yuwono S, Bae J Y, Phan A T. A current-reused low-power four-quadrant multiplier with single-ended current output. IEEE International Symposium on Circuits and Systems, 2009:2114
[8]
Xiao Dingbang, Wu Xuezhong, Hou Zhanqiqng, et al. High-performance micromachined gyroscope with a slanted suspension cantilever. Journal of Semiconductors, 2009, 30(4):044012 doi: 10.1088/1674-4926/30/4/044012
[9]
Liu Yuntao, Liu Xiaowei, Chen Weiping, et al. Design and noise analysis of a sigma-delta capacitive micromachined accelerometer. Journal of Semiconductors, 2010, 31(5):055006 doi: 10.1088/1674-4926/31/5/055006
Fig. 1.  System-level block diagram of the gyroscope.

DownLoad: Full-Size Img PowerPoint
Fig. 2.  The implementation of the CSA.

DownLoad: Full-Size Img PowerPoint
Fig. 3.  The implemented mismatch auto-compensation circuit.

DownLoad: Full-Size Img PowerPoint
Fig. 4.  The implemented auto gain controller.

DownLoad: Full-Size Img PowerPoint
Fig. 5.  Schematic of the variable gain amplifier.

DownLoad: Full-Size Img PowerPoint
Fig. 6.  DC analysis: $V_{\rm out}$ versus $V_{\rm in}$.

DownLoad: Full-Size Img PowerPoint
Fig. 7.  The adjustable phase shifter.

DownLoad: Full-Size Img PowerPoint
Fig. 8.  A microphotograph of the implemented ASIC.

DownLoad: Full-Size Img PowerPoint
Fig. 9.  The test board of the ASIC.

DownLoad: Full-Size Img PowerPoint
Fig. 10.  Closed-loop drive oscillation waveform.

DownLoad: Full-Size Img PowerPoint
Fig. 11.  Relation between rotation rate and output voltage.

DownLoad: Full-Size Img PowerPoint
Fig. 12.  The rate output spectrum.

DownLoad: Full-Size Img PowerPoint
Fig. 13.  Measured root Allan variance.

DownLoad: Full-Size Img PowerPoint

Table 1.   Parameters of the gyroscope.

Table 2.   Summary of key parameters.
[1]
Dong L, Avanesian D. Drive-mode control for vibrational MEMS gyroscopes. IEEE Trans Industrial Electron, 2009, 56(4):956 doi: 10.1109/TIE.2008.2010088
[2]
Sharma A, Zaman M F, Ayazi F. A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes. IEEE J Solid-State Circuits, 2007, 42(8):1790 doi: 10.1109/JSSC.2007.900282
[3]
Aaltonen L, Halonen K. Pseudo-continuous-time teadout circuit for a 300°/s capacitive 2-axis micro-gyroscope. IEEE J Solid-State Circuits, 2009, 44(12):3609 doi: 10.1109/JSSC.2009.2035554
[4]
Qu H, Fang D, Xie H K. A monolithic CMOS-MEMS 3-axis accelerometer with a low-noise, low-power dual-chopper amplifier. IEEE J Sensors, 2008, 8(9):1511 doi: 10.1109/JSEN.2008.923582
[5]
Mikko S, Lasse A, Teemu S. Interface and control electronics for a bulk micromachined capacitive gyroscope. Sensors and Actuators A:Physical, 2008, 147:183 doi: 10.1016/j.sna.2008.03.023
[6]
Cui J, Guo Z, Zhao Q. Force rebalance controller synthesis for a micromachined vibratory gyroscope based on sensitivity margin specifications. J Microelectromechan Syst, 2011, 20(6):1382 doi: 10.1109/JMEMS.2011.2167663
[7]
Yuwono S, Bae J Y, Phan A T. A current-reused low-power four-quadrant multiplier with single-ended current output. IEEE International Symposium on Circuits and Systems, 2009:2114
[8]
Xiao Dingbang, Wu Xuezhong, Hou Zhanqiqng, et al. High-performance micromachined gyroscope with a slanted suspension cantilever. Journal of Semiconductors, 2009, 30(4):044012 doi: 10.1088/1674-4926/30/4/044012
[9]
Liu Yuntao, Liu Xiaowei, Chen Weiping, et al. Design and noise analysis of a sigma-delta capacitive micromachined accelerometer. Journal of Semiconductors, 2010, 31(5):055006 doi: 10.1088/1674-4926/31/5/055006

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2725 Times PDF downloads: 31 Times Cited by: 0 Times

    History

    Received: 11 March 2013 Revised: 30 June 2013 Online: Published: 01 December 2013

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2013  >  34(12): 125009
      Ran Fang, Wengao Lu, Guannan Wang, Tingting Tao, Yacong Zhang, Zhongjian Chen, Dunshan Yu. A low-noise high-linearity interface ASIC for MEMS gyroscopes[J]. Journal of Semiconductors, 2013, 34(12): 125009. doi: 10.1088/1674-4926/34/12/125009 ****R Fang, W G Lu, G N Wang, T T Tao, Y C Zhang, Z J Chen, D S Yu. A low-noise high-linearity interface ASIC for MEMS gyroscopes[J]. J. Semicond., 2013, 34(12): 125009. doi: 10.1088/1674-4926/34/12/125009.
      Citation:
      Ran Fang, Wengao Lu, Guannan Wang, Tingting Tao, Yacong Zhang, Zhongjian Chen, Dunshan Yu. A low-noise high-linearity interface ASIC for MEMS gyroscopes[J]. Journal of Semiconductors, 2013, 34(12): 125009. doi: 10.1088/1674-4926/34/12/125009 ****
      R Fang, W G Lu, G N Wang, T T Tao, Y C Zhang, Z J Chen, D S Yu. A low-noise high-linearity interface ASIC for MEMS gyroscopes[J]. J. Semicond., 2013, 34(12): 125009. doi: 10.1088/1674-4926/34/12/125009.
      shu

      A low-noise high-linearity interface ASIC for MEMS gyroscopes

      DOI: 10.1088/1674-4926/34/12/125009

      • National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China

      Funds:

      Project supported by the Special Fund for Agro-Scientific Research in the Public Interest (No. 200903021)

      the Special Fund for Agro-Scientific Research in the Public Interest 200903021

      More Information
      • Corresponding author: Lu Wengao, wglu@pku.edu.cn
      • Received Date: 2013-03-11
      • Revised Date: 2013-06-30
      • Published Date: 2013-12-01

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return