J. Semicond. > 2017, Volume 38 > Issue 5 > 053003
|

SEMICONDUCTOR MATERIALS

MWCNTs based flexible and stretchable strain sensors

Saeed Ahmed Khan, Min Gao, Yuechang Zhu, Zhuocheng Yan and Yuan Lin

+ Author Affiliations

 Corresponding author: Gao Min, Email: mingao@uestc.edu.cn; Gao Min, Email: mingao@uestc.edu.cn

DOI: 10.1088/1674-4926/38/5/053003

PDF

Abstract: Carbon nanotubes have potential applications in flexible and stretchable devices due to their remarkable electromechanical properties. Flexible and stretchable strain sensors of multi-walled carbon nanotubes (MWCNTs) with aligned or random structures were fabricated on poly-dimethylsiloxane (PDMS) substrate with different techniques. It was observed that the spraycoatedtechniquebased strain sensor fabricated on PDMS substrate showed higher sensitivity higher stretchability, better linearity and excellent longer time stability than the sensor fabricated with other methods presented in this work. The scanning electron microscopy images indicated the spray coating technique can produce a better uniform and compact CNT network, which is the important role affecting the performance of CNT-based flexible strain sensors.

Key words: strain sensor, stretchable sensor, carbon nanotube arrays

Researchers have paid much attention to the strain sensors due to their key contribution to the flexibility and stretchability in foldable electronics, soft robotics, personal/rehabilitation health monitoring[1-4]. So far, various new methods and techniques have been introduced and developed for efficient stretchable and flexible strain sensors for detecting deformation in body motion at large scale[5, 6]. New materials whose properties are extremely high in terms of conductivity, sensitivity and better electrical stability under high strain have been paid more attention for these types of the devices. Carbon nanotubes (CNTs) are considered as one of the main materials in the field of nanotechnology possessing more tensile strength than steel, better electrical and thermal conductivity, and, owing to these properties, it has been intensively demanded by many researchers in the field of highperformance artificial muscles, battery electrodes and flexible super capacitors[7-10]. It has opened various fronts for research to fabricate CNTbased devices due to its tiny size and fibril structure[11]. It has been observed from many research findings that CNT-based sensors have low sensitivity, nonlinearity, poor restorability, narrow strain window in linear response having large hysteresis upon stretching and releasing process[12-14]. This may be the effect of applying strain: the CNT network could be damaged easily. However, it is crucial to resolve these problems before implementation of CNT-based strain sensors in real life. Tremendous work has been done in the field of actuators and sensors to explore this versatile material. Many researchers have investigated piezoresistive properties of individual CNTs by using micro-electro-mechanical system (MEMS)[15, 16]. An individual CNT possesses solid properties for sensor applications, but its poor process ability & integration complexity into bulk structures narrowed their widespread use. It has been reported by many researchers that dispersing CNTs into polymers or liquids by introducing some complex methods could improve the performance of sensors by forming 3D CNT network to strengthen the conductivity[17, 18]. It has been investigated from recent studies that CNT-based strain sensors have produced excellent results versus conventional sensors. However, it has been observed that without applying mechanical load[4, 19], CNT/polymer film sensors' resistance have been changed with time, which revealed an alarming situation for practical applications. This drift was thought to be the defects and breakdown of CNT shell structure[20], and could be from the current effect when current passed through the CNT sensor[19]. Moreover, it has been investigated that strain sensor based on CNT composite shows hysteresis resistance under repeated strain loads[21, 22], which reveals progressively worse CNT/polymer interfaces. In addition, temperature effect on sensitivity remained unsolved. For fabricating strain gauges, CNT Bucky papers have also been used[23, 24]. However, due to their low strength and deformation (approximately 0.5%), they are not convenient to be used for multi-functionality and reproducibility applications. In another method, CNTs were used as sensor & actuators by dipping them into electrolyte with high voltage (EDP method)[25]. From the investigations, it has been concluded that these CNT-based sensors are unsuitable to be applied in commercialized applications.

Herein, we report MWCNTs-based strain sensors fabricated by three different methods. We investigated and presented strain and resistance of the three strain sensors fabricated with different techniques. Our findings revealed after going through various experiments and measurements that the spray coated sample showed 60% strain better linearity and with small hysteresis curve.

2.1 Synthesis of the MWCNTs

In this paper, we used two kinds of MWCNTs. One is the commercial MWCNTs purchased from Beijing Dk Nano technology Co., Ltd, Beijing, China with the diameter of 8-15 nm. The other kind was MWCNT arrays grown on SiO2 wafer through floating catalyst chemical vapor deposition (CVD)[26, 27]. A schematic diagram of floating catalyst CVD process has been illustrated in Fig. 1. A few samples of 300-nm thick SiO2 silicon substrate were placed inside the quartz tube on a high temperature at the middle of the furnace tube. 10% H2 and 90% Ar gas as a carrier gas for growth of CNTs was introduced to quartz tube and precursor solution was injected by an injector at 80 ℃. In our experiment 2.106 g of ferrocene in 120 ml xylene were mixed together to prepare precursor solution followed by sonication and starrier. This solution was pre-heated at 200 ℃ with an injector's speed of 8 mL/h. By controlling the growth time, we can get different length of CNT arrays. Fig. 2 illustrates the SEM images of the two kinds of MWCNTs, respectively. The diameter of the CNTs has some difference, but the performance of strain sensors based on CNTs is mainly confirmed by the structure of the sensors not the diameter of CNTs.

Figure  1.  (Color online) Schematic diagram of the CVD method for growing MWCNT arrays.
DownLoad: Full-Size Img PowerPoint
Figure  2.  SEM images of (a) commercial MWCNTs and (b) MWCNT arrays grown by CVD method.
DownLoad: Full-Size Img PowerPoint

2.2 The preparation of PDMS substrate

The PDMS is commonly used by many researchers with the same following process. PDMS (Dow Corning Sylgard 184; proportion of base to cross-linker, 10:1 by mass) was blended, then it was degassed in vacuum for half an hour and poured against the cleaned surface of a silicon wafer with a 300 nm silicon oxide layer. After that, it was put in an oven or in room temperature for 24 h to cure.

2.3 Spray coating of CNTs solution

For spray coating sample, a solution of MWCNTs was prepared from 10 mg of MWCNTs powder with the 10-20 ml of N-methylpyrolidone followed by 30 min sonication. MWCNTs sample was fabricated by spray coating of 40 times with 9 s delay at the temperature of 200 ℃ on PDMS substrate.

2.4 Direct deposition of MWCNTs

At 100 ℃ dry powder of MWCNTs was deposited on PDMS substrate by applying pressure to spread MWCNTs on PDMS substrate. The sketch of MWCNTs powder-based strain sensor is shown in Fig. 3.

Figure  3.  Schematic structures of spray coating of MWCNTs on PDMS substrate, powder MWCNTs on PDMS substrate and CNT arrays transferred on PDMS substrate, respectively.
DownLoad: Full-Size Img PowerPoint

2.5 CNT array-based sensors

To fabricate CNT array-based strain sensors, the PDMS solution was dropped on the surface of CNT arrays at about 25 ℃ for 24 h to solidify the PDMS. Then the CNT arrays were immersed in PDMS and stuck onto the PDMS, which were peeled off from 300-nm thick SiO2 silicon substrate for strain sensor measurement. The structure for MWCNT array-based strain sensor is illustrated in Fig. 3.

The output resistance change was observed by applying strain on the PDMS layer of MWCNTs sheet to obtain the sensing properties. Fig. 4 reveals that the resistance response with strain has a wider linear range than strain sensor-based CNTs and graphene (2%-5%) reported by other groups[11, 12, 28, 29], the hysteresis curve reveals the wider range and can be noticed in Fig. 5. CNTs low density could be the consequence on the substrates. Linear equation can be established for linear region between strain and resistance for calculating direct values of strain applied on the device corresponding detected resistance while noticing the change in curves. It might be convenient to detect the change in strain accurately. Wider linear range reveals that strain can work in higher strain region and the strain can be calculated accurately with linear equation.

Figure  4.  Change in resistance with strain for different sensors.
DownLoad: Full-Size Img PowerPoint
Figure  5.  (Color online) Stretch/release hysteresis curves of the samples. (a) MWCNTs layer coated by spray technique on PDMS substrate. (b) Powder CNTs deposited on PDMS. (c) and (d) CVD method grown array MWCNTs for short and long time method on SiO2 substrate.
DownLoad: Full-Size Img PowerPoint

Hysteresis curves in respect to wider range are presented in Fig. 5. The change in corresponding resistance can be observed linearly by applying strain in Fig. 5(a). The sample was recorded with excellent performance and maximum strain of 60% which is better than the generally available strain sensors. However, low sensitivity and nonlinear response of the dry powder MWCNTs sample and different lengths CVD-grown array CNTs can be observed in Figs. 5(b), 5(c), and 5(d). We discovered that spray coating sensor on PDMS substrate showed higher sensitivity in Fig. 5(a) than the other sensors reported Figs. 5(b), 5(c), and 5(d). The high sensitivity reveals that each individual CNT is connected with neighboring CNTs on MWCNTs sheet along its length as shown in SEM images of Fig. 3. When the strain is increased, it causes disconnection of CNTs thereby causing increase in resistance change.

Moreover, the sensitivity of samples prepared by dry MWCNTs powder showed better results in terms of low hysteresis and good linearity than that of MWCNT arrays in two cycles of the stress and strain measurement. All in all, MWCNT arrays grown by CVD process on SiO2 showed nonlinearity, high hysteresis and small stretchability compared to spray coated and dry CNT sample. It could be because the high density of CNT arrays can prevent the change of contact resistance between CNTs when the strain is applied to the sample.

In addition, the long-term stability and repeatability of the spray coating sample on PDMS substrate was carried out by using standard test machine. Periodically, strain was applied while investigating the performance of the sample. The change in resistance result can be observed in Fig. 6. We can see clearly, the variations are within 10%, which indicates that the fabricated strain sensor possesses better stability and can be reliable for motion capturing. In brief, the strain sensors produced by spray coating have almost the same excellent performance as in the earlier report[30, 31], but the preparation method is much simpler and cheaper.

Figure  6.  Long-term stability of strain sensors fabricated by spray coating MWCNTs on PDMS substrate under tensile stress.
DownLoad: Full-Size Img PowerPoint

To get a better understanding about the influence of MWCNT structure on the performance of flexible strain sensors, SEM images were utilized to check the microstructure of MWCNT-based sensors. The SEM images for MWCNT strain sensors fabricated by spray coating, direct deposition and MWCNT arrays were shown in Fig. 7. The surface structures of sensors fabricated by spray coating and direct deposition, in Figs. 7(a) and 7(b), presented that the MWCNT sheet prepared by directly depositing on PDMS substrate was not uniform and has more holes. For MWCNT arrays, Fig. 7(c) showed the sample had high density of MWCNTs. The cross-sectional SEM images indicated that some MWCNTs were immersed in the PDMS substrates fabricated by direct deposition. For the sensors fabricated by spray coating shown in Fig. 7(d), the CNTs had close contact with the PDMS substrate, but the CNTs had not penetrated into PDMS as in Fig. 7(e). When PDMS immerged into the MWCNTs arrays, shown in Fig. 7(f), the structure of MWCNTs arrays kept the same. It is well known that the connection properties between MWCNTs would dominate the stretchability and sensitivity of MWCNT strain sensors. When more CNTs were immersed in the PDMS substrates, it could decrease the sensitivity of these strain sensors because CNT-polymer composite has lower sensitivity[31]. MWCNT arrays have orientation, which is beneficial to produce strain sensors with directional selectivity. However, in our experiment, the density of MWCNTs limited the sensitivity of this kind of sensor. High density of MWCNTs means more connections between MWCNTs, which implied strain can hardly change the connection resistance. Controlling the density of aligned CNTs may improve the performance.

Figure  7.  SEM images of the surface for (a) spray coating of MWCNTs on PDMS and (b) dry CNTs deposition on PDMS. (c) is the SEM image of the cross-section of MWCNTs arrays grown on SiO2. (d)–(e) SEM images of the cross-section for (d) spray coating of MWCNTs on PDMS, (e) dry CNTs deposition on PDMS and (f) MWCNTs arrays on PDMS, respectively.
DownLoad: Full-Size Img PowerPoint

In summary, different flexible strain sensors with different structures based on MWCNTs were fabricated by different techniques. One of the sensors prepared by spray coating MWCNTs solution on PDMS substrate exhibits higher stretchability and sensitivity compared with other sensors, while the CNT arrays-based strain sensors have the lowest response to the strain. The microstructure of these different CNT-based strain sensors from SEM images elucidated that controlling the distribution, density and connection of CNT network is the key factor in fabricating CNT-based strain sensors. This sensor produced by spray coating MWCNTs with uniform CNT network and better performance in sensitivity than the generally available sensors reveals that spray coating technique is a more economic method to develop CNT-based strain sensors in detecting human body motion and other applications.



[1]
Mattmann C, Clemens F, Troster G. Sensor for measuring strain in textile. Sensors, 2008, 8(6): 3719 doi: 10.3390/s8063719
[2]
Castano L M, Flatau A B. Smart fabric sensors and e-textile technologies: a review. Smart Mater Struct, 2014, 23(5): 053001 doi: 10.1088/0964-1726/23/5/053001
[3]
Kim R H, Kim D H, Xiao J L, et al. Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics. Nat Mater, 2010, 9(11): 929 doi: 10.1038/nmat2879
[4]
Kang I P, Schulz M J, Kim J H, et al. A carbon nanotube strain sensor for structural health monitoring. Smart Mater Struct, 2006, 15(3): 737 doi: 10.1088/0964-1726/15/3/009
[5]
Rahimi R, Ochoa M, Yu W Y, et al. Highly stretchable and sensitive unidirectional strain sensor via laser carbonization. ACS Appl Mater Interfaces, 2015, 7(8): 4463 doi: 10.1021/am509087u
[6]
Boland C S, Khan U, Backes C, et al. Sensitive, high-strain, highrate bodily motion sensors based on graphene-rubber composites. ACS Nano, 2014, 8(9): 8819 doi: 10.1021/nn503454h
[7]
Vigolo B, Penicaud A, Coulon C, et al. Macroscopic fibers and ribbons of oriented carbon nanotubes. Science, 2000, 290(5495): 1331 doi: 10.1126/science.290.5495.1331
[8]
Jiang K L, Li Q Q, Fan S S. Nanotechnology: spinning continuous carbon nanotube yarns-carbon nanotubes weave their way into a range of imaginative macroscopic applications. Nature, 2002, 419(6909): 801 doi: 10.1038/419801a
[9]
Kakade B A, Pillai V K, Late D J, et al. High current density, low threshold field emission from functionalized carbon nanotube bucky paper. Appl Phys Lett, 2010, 97(7): 073102 doi: 10.1063/1.3479049
[10]
Sharma R B, Late D J, Joag D S, et al. Field emission properties of boron and nitrogen doped carbon nanotubes. Chem Phys Lett, 2006, 428(1-3): 102 doi: 10.1016/j.cplett.2006.06.089
[11]
Liu C X, Choi J W. Patterning conductive PDMS nanocomposite in an elastomer using microcontact printing. J Micromechan Microeng, 2009, 19(8): 085019 doi: 10.1088/0960-1317/19/8/085019
[12]
Li Y B, Shang Y Y, He X D, et al. Overtwisted, resolvable carbon nanotube yarn entanglement as strain sensors and rotational actuators. ACS Nano, 2013, 7(9): 8128 doi: 10.1021/nn403400c
[13]
Liu L Q, Ma W J, Zhang Z. Macroscopic carbon nanotube assemblies: preparation, properties, and potential applications. Small, 2011, 7(11): 1504 doi: 10.1002/smll.v7.11
[14]
Yamada T, Hayamizu Y, Yamamoto Y, et al. A stretchable carbon nanotube strain sensor for human-motion detection. Nat Nanotechnol, 2011, 6(5): 296 doi: 10.1038/nnano.2011.36
[15]
Atashbar M Z, Bejcek B E, Singamaneni S. Carbon nanotube network-based biomolecule detection. IEEE Sensors J, 2006, 6(3): 524 doi: 10.1109/JSEN.2006.874491
[16]
Zheng F Z, Zhou Z Y, Yang X, et al. Sorting single-walled carbon nanotubes by strain-based electrical burn-off. Carbon, 2010, 48(8): 2169 doi: 10.1016/j.carbon.2010.02.013
[17]
Knite M, Tupureina V, Fuith A, et al. Polyisoprene-multi-wall carbon nanotube composites for sensing strain. Mater Sci Eng C, 2007, 27(5-8): 1125 doi: 10.1016/j.msec.2006.08.016
[18]
Thostenson E T, Chou T W. Carbon nanotube networks: sensing of distributed strain and damage for life prediction and self healing. Adv Mater, 2006, 18(21): 2837 doi: 10.1002/(ISSN)1521-4095
[19]
Loh K J, Kim J, Lynch J P, et al. Multifunctional layer-by-layer carbon nanotube-polyelectrolyte thin films for strain and corrosion sensing. Smart Mater Struct, 2007, 16(2): 429 doi: 10.1088/0964-1726/16/2/022
[20]
Li X, Levy C, Elaadil L. Multiwalled carbon nanotube film for strain sensing. Nanotechnology, 2008, 19(4): 045501 doi: 10.1088/0957-4484/19/04/045501
[21]
Boeger L, Wichmann M H G, Meyer L O, et al. Load and health monitoring in glass fibre reinforced composites with an electrically conductive nanocomposite epoxy matrix. Compos Sci Technol, 2008, 68(7/8): 1886 https://www.researchgate.net/publication/222959551_Load_and_Health_Monitoring_in_Glass_Fibre_Reinforced_Composites_with_an_Electrically_Conductive_Nanocomposite_Epoxy_Matrix
[22]
Thostenson E T, Chou T W. Real-time in situ sensing of damage evolution in advanced fiber composites using carbon nanotube networks. Nanotechnology, 2008, 19(21): 215713 doi: 10.1088/0957-4484/19/21/215713
[23]
Dharap P, Li Z L, Nagarajaiah S, et al. Nanotube film based on single-wall carbon nanotubes for strain sensing. Nanotechnology, 2004, 15(3): 379 doi: 10.1088/0957-4484/15/3/026
[24]
Li Z L, Dharap P, Nagarajaiah S, et al. Carbon nanotube film sensors. Adv Mater, 2004, 16(7): 640 doi: 10.1002/(ISSN)1521-4095
[25]
Mirfakhrai T, Oh J, Kozlov M, et al. Carbon nanotube yarns as high load actuators and sensors. Adv Sci Technol, 2008, 61: 65 doi: 10.4028/www.scientific.net/AST.61
[26]
Li X S, Cao A Y, Jung Y J, et al. Bottom-up growth of carbon nanotube multilayers: unprecedented growth. Nano Lett, 2005, 5(10): 1997 doi: 10.1021/nl051486q
[27]
Talapatra S, Kar S, Pal S K, et al. Direct growth of aligned carbon nanotubes on bulk metals. Nat Nanotechnol, 2006, 1(2): 112 doi: 10.1038/nnano.2006.56
[28]
Hempel M, Nezich D, Kong J, et al. A novel class of strain gauges based on layered percolative films of 2D materials. Nano Lett, 2012, 12(11): 5714 doi: 10.1021/nl302959a
[29]
Bae S H, Lee Y, Sharma B K, et al. Graphene-based transparent strain sensor. Carbon, 2013, 51: 236 doi: 10.1016/j.carbon.2012.08.048
[30]
Zhang S, Zhang H, Yao G, et al. Highly stretchable, sensitive, and flexible strain sensors based on silver nanoparticles/carbon nanotubes composites. J Alloys Compd, 2015, 652: 48 doi: 10.1016/j.jallcom.2015.08.187
[31]
Song Y, Lee J I, Pyo S, et al. A highly sensitive flexible strain sensor based on the contact resistance change of carbon nanotube bundles. Nanotechnology, 2016, 27(20): 205502 doi: 10.1088/0957-4484/27/20/205502
Fig. 1.  (Color online) Schematic diagram of the CVD method for growing MWCNT arrays.

DownLoad: Full-Size Img PowerPoint
Fig. 2.  SEM images of (a) commercial MWCNTs and (b) MWCNT arrays grown by CVD method.

DownLoad: Full-Size Img PowerPoint
Fig. 3.  Schematic structures of spray coating of MWCNTs on PDMS substrate, powder MWCNTs on PDMS substrate and CNT arrays transferred on PDMS substrate, respectively.

DownLoad: Full-Size Img PowerPoint
Fig. 4.  Change in resistance with strain for different sensors.

DownLoad: Full-Size Img PowerPoint
Fig. 5.  (Color online) Stretch/release hysteresis curves of the samples. (a) MWCNTs layer coated by spray technique on PDMS substrate. (b) Powder CNTs deposited on PDMS. (c) and (d) CVD method grown array MWCNTs for short and long time method on SiO2 substrate.

DownLoad: Full-Size Img PowerPoint
Fig. 6.  Long-term stability of strain sensors fabricated by spray coating MWCNTs on PDMS substrate under tensile stress.

DownLoad: Full-Size Img PowerPoint
Fig. 7.  SEM images of the surface for (a) spray coating of MWCNTs on PDMS and (b) dry CNTs deposition on PDMS. (c) is the SEM image of the cross-section of MWCNTs arrays grown on SiO2. (d)–(e) SEM images of the cross-section for (d) spray coating of MWCNTs on PDMS, (e) dry CNTs deposition on PDMS and (f) MWCNTs arrays on PDMS, respectively.

DownLoad: Full-Size Img PowerPoint
[1]
Mattmann C, Clemens F, Troster G. Sensor for measuring strain in textile. Sensors, 2008, 8(6): 3719 doi: 10.3390/s8063719
[2]
Castano L M, Flatau A B. Smart fabric sensors and e-textile technologies: a review. Smart Mater Struct, 2014, 23(5): 053001 doi: 10.1088/0964-1726/23/5/053001
[3]
Kim R H, Kim D H, Xiao J L, et al. Waterproof AlInGaP optoelectronics on stretchable substrates with applications in biomedicine and robotics. Nat Mater, 2010, 9(11): 929 doi: 10.1038/nmat2879
[4]
Kang I P, Schulz M J, Kim J H, et al. A carbon nanotube strain sensor for structural health monitoring. Smart Mater Struct, 2006, 15(3): 737 doi: 10.1088/0964-1726/15/3/009
[5]
Rahimi R, Ochoa M, Yu W Y, et al. Highly stretchable and sensitive unidirectional strain sensor via laser carbonization. ACS Appl Mater Interfaces, 2015, 7(8): 4463 doi: 10.1021/am509087u
[6]
Boland C S, Khan U, Backes C, et al. Sensitive, high-strain, highrate bodily motion sensors based on graphene-rubber composites. ACS Nano, 2014, 8(9): 8819 doi: 10.1021/nn503454h
[7]
Vigolo B, Penicaud A, Coulon C, et al. Macroscopic fibers and ribbons of oriented carbon nanotubes. Science, 2000, 290(5495): 1331 doi: 10.1126/science.290.5495.1331
[8]
Jiang K L, Li Q Q, Fan S S. Nanotechnology: spinning continuous carbon nanotube yarns-carbon nanotubes weave their way into a range of imaginative macroscopic applications. Nature, 2002, 419(6909): 801 doi: 10.1038/419801a
[9]
Kakade B A, Pillai V K, Late D J, et al. High current density, low threshold field emission from functionalized carbon nanotube bucky paper. Appl Phys Lett, 2010, 97(7): 073102 doi: 10.1063/1.3479049
[10]
Sharma R B, Late D J, Joag D S, et al. Field emission properties of boron and nitrogen doped carbon nanotubes. Chem Phys Lett, 2006, 428(1-3): 102 doi: 10.1016/j.cplett.2006.06.089
[11]
Liu C X, Choi J W. Patterning conductive PDMS nanocomposite in an elastomer using microcontact printing. J Micromechan Microeng, 2009, 19(8): 085019 doi: 10.1088/0960-1317/19/8/085019
[12]
Li Y B, Shang Y Y, He X D, et al. Overtwisted, resolvable carbon nanotube yarn entanglement as strain sensors and rotational actuators. ACS Nano, 2013, 7(9): 8128 doi: 10.1021/nn403400c
[13]
Liu L Q, Ma W J, Zhang Z. Macroscopic carbon nanotube assemblies: preparation, properties, and potential applications. Small, 2011, 7(11): 1504 doi: 10.1002/smll.v7.11
[14]
Yamada T, Hayamizu Y, Yamamoto Y, et al. A stretchable carbon nanotube strain sensor for human-motion detection. Nat Nanotechnol, 2011, 6(5): 296 doi: 10.1038/nnano.2011.36
[15]
Atashbar M Z, Bejcek B E, Singamaneni S. Carbon nanotube network-based biomolecule detection. IEEE Sensors J, 2006, 6(3): 524 doi: 10.1109/JSEN.2006.874491
[16]
Zheng F Z, Zhou Z Y, Yang X, et al. Sorting single-walled carbon nanotubes by strain-based electrical burn-off. Carbon, 2010, 48(8): 2169 doi: 10.1016/j.carbon.2010.02.013
[17]
Knite M, Tupureina V, Fuith A, et al. Polyisoprene-multi-wall carbon nanotube composites for sensing strain. Mater Sci Eng C, 2007, 27(5-8): 1125 doi: 10.1016/j.msec.2006.08.016
[18]
Thostenson E T, Chou T W. Carbon nanotube networks: sensing of distributed strain and damage for life prediction and self healing. Adv Mater, 2006, 18(21): 2837 doi: 10.1002/(ISSN)1521-4095
[19]
Loh K J, Kim J, Lynch J P, et al. Multifunctional layer-by-layer carbon nanotube-polyelectrolyte thin films for strain and corrosion sensing. Smart Mater Struct, 2007, 16(2): 429 doi: 10.1088/0964-1726/16/2/022
[20]
Li X, Levy C, Elaadil L. Multiwalled carbon nanotube film for strain sensing. Nanotechnology, 2008, 19(4): 045501 doi: 10.1088/0957-4484/19/04/045501
[21]
Boeger L, Wichmann M H G, Meyer L O, et al. Load and health monitoring in glass fibre reinforced composites with an electrically conductive nanocomposite epoxy matrix. Compos Sci Technol, 2008, 68(7/8): 1886 https://www.researchgate.net/publication/222959551_Load_and_Health_Monitoring_in_Glass_Fibre_Reinforced_Composites_with_an_Electrically_Conductive_Nanocomposite_Epoxy_Matrix
[22]
Thostenson E T, Chou T W. Real-time in situ sensing of damage evolution in advanced fiber composites using carbon nanotube networks. Nanotechnology, 2008, 19(21): 215713 doi: 10.1088/0957-4484/19/21/215713
[23]
Dharap P, Li Z L, Nagarajaiah S, et al. Nanotube film based on single-wall carbon nanotubes for strain sensing. Nanotechnology, 2004, 15(3): 379 doi: 10.1088/0957-4484/15/3/026
[24]
Li Z L, Dharap P, Nagarajaiah S, et al. Carbon nanotube film sensors. Adv Mater, 2004, 16(7): 640 doi: 10.1002/(ISSN)1521-4095
[25]
Mirfakhrai T, Oh J, Kozlov M, et al. Carbon nanotube yarns as high load actuators and sensors. Adv Sci Technol, 2008, 61: 65 doi: 10.4028/www.scientific.net/AST.61
[26]
Li X S, Cao A Y, Jung Y J, et al. Bottom-up growth of carbon nanotube multilayers: unprecedented growth. Nano Lett, 2005, 5(10): 1997 doi: 10.1021/nl051486q
[27]
Talapatra S, Kar S, Pal S K, et al. Direct growth of aligned carbon nanotubes on bulk metals. Nat Nanotechnol, 2006, 1(2): 112 doi: 10.1038/nnano.2006.56
[28]
Hempel M, Nezich D, Kong J, et al. A novel class of strain gauges based on layered percolative films of 2D materials. Nano Lett, 2012, 12(11): 5714 doi: 10.1021/nl302959a
[29]
Bae S H, Lee Y, Sharma B K, et al. Graphene-based transparent strain sensor. Carbon, 2013, 51: 236 doi: 10.1016/j.carbon.2012.08.048
[30]
Zhang S, Zhang H, Yao G, et al. Highly stretchable, sensitive, and flexible strain sensors based on silver nanoparticles/carbon nanotubes composites. J Alloys Compd, 2015, 652: 48 doi: 10.1016/j.jallcom.2015.08.187
[31]
Song Y, Lee J I, Pyo S, et al. A highly sensitive flexible strain sensor based on the contact resistance change of carbon nanotube bundles. Nanotechnology, 2016, 27(20): 205502 doi: 10.1088/0957-4484/27/20/205502
1

High Curie temperature ferromagnetism and high hole mobility in tensile strained Mn-doped SiGe thin films

Jianhua Zhao

Journal of Semiconductors, 2020, 41(8): 080201. doi: 10.1088/1674-4926/41/8/080201
2

Reactive facet of carbon nitride single crystals

Kong Liu

Journal of Semiconductors, 2020, 41(9): 090202. doi: 10.1088/1674-4926/41/9/090202
3

Nanofiber/nanowires-based flexible and stretchable sensors

Dongyi Wang, Lili Wang, Guozhen Shen

Journal of Semiconductors, 2020, 41(4): 041605. doi: 10.1088/1674-4926/41/4/041605
4

Flexible and stretchable photodetectors and gas sensors for wearable healthcare based on solution-processable metal chalcogenides

Qi Yan, Liang Gao, Jiang Tang, Huan Liu

Journal of Semiconductors, 2019, 40(11): 111604. doi: 10.1088/1674-4926/40/11/111604
5

Preparation and application of carbon nanotubes flexible sensors

Shuo Li, Xiao Feng, Hao Liu, Kai Wang, Yun-Ze Long, et al.

Journal of Semiconductors, 2019, 40(11): 111606. doi: 10.1088/1674-4926/40/11/111606
6

Stretchable human-machine interface based on skin-conformal sEMG electrodes with self-similar geometry

Wentao Dong, Chen Zhu, Wei Hu, Lin Xiao, Yong’an Huang, et al.

Journal of Semiconductors, 2018, 39(1): 014001. doi: 10.1088/1674-4926/39/1/014001
7

Ultrathin free-standing graphene oxide film based flexible touchless sensor

Lin Liu, Yingyi Wang, Guanghui Li, Sujie Qin, Ting Zhang, et al.

Journal of Semiconductors, 2018, 39(1): 013002. doi: 10.1088/1674-4926/39/1/013002
8

Silver nanowire/polymer composite soft conductive film fabricated by large-area compatible coating for flexible pressure sensor array

Sujie Chen, Siying Li, Sai Peng, Yukun Huang, Jiaqing Zhao, et al.

Journal of Semiconductors, 2018, 39(1): 013001. doi: 10.1088/1674-4926/39/1/013001
9

Printed stretchable circuit on soft elastic substrate for wearable application

Wei Yuan, Xinzhou Wu, Weibing Gu, Jian Lin, Zheng Cui, et al.

Journal of Semiconductors, 2018, 39(1): 015002. doi: 10.1088/1674-4926/39/1/015002
10

Engineering in-plane silicon nanowire springs for highly stretchable electronics

Zhaoguo Xue, Taige Dong, Zhimin Zhu, Yaolong Zhao, Ying Sun, et al.

Journal of Semiconductors, 2018, 39(1): 011001. doi: 10.1088/1674-4926/39/1/011001
11

Strain effect on intersubband transitions in rolled-up quantum well infrared photodetectors

Han Wang, Shilong Li, Honglou Zhen, Xiaofei Nie, Gaoshan Huang, et al.

Journal of Semiconductors, 2017, 38(5): 054006. doi: 10.1088/1674-4926/38/5/054006
12

Resistive humidity sensor based on vanadium complex films

Kh. S. Karimov, M. Saleem, M. Mahroof-Tahir, R. Akram, M.T. Saeed Chanee, et al.

Journal of Semiconductors, 2014, 35(9): 094001. doi: 10.1088/1674-4926/35/9/094001
13

Inter valley phonon scattering mechanism in strained Si/(101) Si1-xGex

Zhao Jin, Liping Qiao, Ce Liu, Chen Guo, Lidong Liu, et al.

Journal of Semiconductors, 2013, 34(7): 072002. doi: 10.1088/1674-4926/34/7/072002
14

A CMOS AC/DC charge pump for a wireless sensor network

Zhang Qiang, Ni Weining, Shi Yin, Yu Yude

Journal of Semiconductors, 2012, 33(10): 105003. doi: 10.1088/1674-4926/33/10/105003
15

Spacing optimization of high power LED arrays for solid state lighting

Y. Sing Chan, S. W. Ricky Lee

Journal of Semiconductors, 2011, 32(1): 014005. doi: 10.1088/1674-4926/32/1/014005
16

SPICE compatible analytical electron mobility model for biaxial strained-Si-MOSFETs

Amit Chaudhry, J. N. Roy, S. Sangwan

Journal of Semiconductors, 2011, 32(5): 054001. doi: 10.1088/1674-4926/32/5/054001
17

Influence of Ni Schottky contact thickness on two-dimensional electron-gas sheet carrier concentration of strained Al0.3Ga0.7N/GaN heterostructures

Zhao Jianzhi, Lin Zhaojun, Lü Yuanjie, Corrigan Timothy D, Meng Lingguo, et al.

Journal of Semiconductors, 2010, 31(8): 084007. doi: 10.1088/1674-4926/31/8/084007
18

Influence of voltage on photo-electrochemical etching of n-type macroporous silicon arrays

Wang Guozheng, Fu Shencheng, Chen Li, Wang Ji, Qin Xulei, et al.

Journal of Semiconductors, 2010, 31(11): 116002. doi: 10.1088/1674-4926/31/11/116002
19

Nanoscale strained-Si MOSFET physics and modeling approaches: a review

Amit Chaudhry, J. N. Roy, Garima Joshi

Journal of Semiconductors, 2010, 31(10): 104001. doi: 10.1088/1674-4926/31/10/104001
20

Working mechanism of a SiC nanotube NO2 gas sensor

Ding Ruixue, Yang Yintang, Liu Lianxi

Journal of Semiconductors, 2009, 30(11): 114010. doi: 10.1088/1674-4926/30/11/114010
1. Aminul Islam, M., Hasan, M., Rahman, M. et al. Advances and significances of carbon nanotube applications: A comprehensive review. European Polymer Journal, 2024. doi:10.1016/j.eurpolymj.2024.113443
2. Raman, A.P.S., Singh, S.Y.M.B., Bahadur, I. et al. Carbon Nanotubes and Its Composites in Sensing of Drugs and Pesticides. Advanced Functional Materials for Sustainable Environments, 2024. doi:10.1007/978-3-031-62620-3_24
3. Noroozi, S., Safa, F., Shariati, S. et al. Differential pulse voltammetric assessment of phthalate molecular blocking effect on the copper electrode modified by multi-walled carbon nanotubes: Statistical optimization by Box-Behnken experimental design. Arabian Journal of Chemistry, 2023, 16(8): 104874. doi:10.1016/j.arabjc.2023.104874
4. Wang, H., Liu, C., Li, B. et al. Advances in Carbon-Based Resistance Strain Sensors. ACS Applied Electronic Materials, 2023, 5(2): 674-689. doi:10.1021/acsaelm.2c01375
5. Alfei, S., Schito, G.C. Nanotubes: Carbon-Based Fibers and Bacterial Nano-Conduits Both Arousing a Global Interest and Conflicting Opinions. Fibers, 2022, 10(9): 75. doi:10.3390/fib10090075
6. Gulati, S., Sharma, N., Goyal, K. Functionalization of carbon nanotubes: A multifaceted and upcoming diagnostic tool in the clinical domain. Functionalized Carbon Nanomaterials for Theranostic Applications, 2022. doi:10.1016/B978-0-12-824366-4.00010-8
7. Weng, Z., Guan, R., Zou, F. et al. A highly sensitive polydopamine@hybrid carbon nanofillers based nanocomposite sensor for acquiring high-frequency ultrasonic waves. Carbon, 2020. doi:10.1016/j.carbon.2020.08.030
8. Anzar, N., Hasan, R., Tyagi, M. et al. Carbon nanotube - A review on Synthesis, Properties and plethora of applications in the field of biomedical science. Sensors International, 2020. doi:10.1016/j.sintl.2020.100003
9. Lundberg, A., Zhao, X., Kanoun, O. Investigation of stability and dynamic behavior of a carbon nanotube/epoxy composite strain sensor. 2019. doi:10.1109/SSD.2019.8893263
10. Song, J., Tan, Y., Chu, Z. et al. Hierarchical Reduced Graphene Oxide Ridges for Stretchable, Wearable, and Washable Strain Sensors. ACS Applied Materials and Interfaces, 2019, 11(1): 1283-1293. doi:10.1021/acsami.8b18143
11. Song, Y., Miao, Y., Meng, Y. et al. Synthesizing and Modifying Carbon-based Nanomaterials by Plasma Techniques | [利用等离子体技术制备和改性碳基纳米材料的研究进展]. Cailiao Daobao/Materials Review, 2018, 32(10): 3295-3303 and 3308. doi:10.11896/j.issn.1005-023X.2018.19.002

    • Search

    Advanced Search >>

    GET CITATION

    Saeed Ahmed Khan, Min Gao, Yuechang Zhu, Zhuocheng Yan, Yuan Lin. MWCNTs based flexible and stretchable strain sensors[J]. Journal of Semiconductors, 2017, 38(5): 053003. doi: 10.1088/1674-4926/38/5/053003
    S A Khan, M Gao, Y C Zhu, Z C Yan, Y Lin. MWCNTs based flexible and stretchable strain sensors[J]. J. Semicond., 2017, 38(5): 053003. doi: 10.1088/1674-4926/38/5/053003.
    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 3841 Times PDF downloads: 53 Times Cited by: 11 Times

    History

    Received: 07 June 2016 Revised: 07 October 2016 Online: Published: 01 May 2017

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2017  >  38(5): 053003
      Saeed Ahmed Khan, Min Gao, Yuechang Zhu, Zhuocheng Yan, Yuan Lin. MWCNTs based flexible and stretchable strain sensors[J]. Journal of Semiconductors, 2017, 38(5): 053003. doi: 10.1088/1674-4926/38/5/053003 ****S A Khan, M Gao, Y C Zhu, Z C Yan, Y Lin. MWCNTs based flexible and stretchable strain sensors[J]. J. Semicond., 2017, 38(5): 053003. doi: 10.1088/1674-4926/38/5/053003.
      Citation:
      Saeed Ahmed Khan, Min Gao, Yuechang Zhu, Zhuocheng Yan, Yuan Lin. MWCNTs based flexible and stretchable strain sensors[J]. Journal of Semiconductors, 2017, 38(5): 053003. doi: 10.1088/1674-4926/38/5/053003 ****
      S A Khan, M Gao, Y C Zhu, Z C Yan, Y Lin. MWCNTs based flexible and stretchable strain sensors[J]. J. Semicond., 2017, 38(5): 053003. doi: 10.1088/1674-4926/38/5/053003.
      shu

      MWCNTs based flexible and stretchable strain sensors

      DOI: 10.1088/1674-4926/38/5/053003

      • State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China

      Funds:

      the National Basic Research Program of China No.2015CB351905

      National Natural Science Foundation of China No.61306015

      "111" Project No.B13042

      Technology Innovative Research Team of Sichuan Province of China No.2015TD0005

      Project supported by the National Basic Research Program of China (No.2015CB351905), the National Natural Science Foundation of China (No.61306015), the Technology Innovative Research Team of Sichuan Province of China (No.2015TD0005), and "111" Project (No.B13042)

      More Information

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return