Fig. 1.
XRD patterns for pristine and Fe-doped TiO2 thin films annealed at 500 °C (# rutile).
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Dipak L Gapale, Pranav P. Bardapurkar, Sandeep A. Arote, Sanjaykumar Dalvi, Prashant Baviskar, Ratan Y Borse. Humidity sensing properties of spray deposited Fe doped TiO2 thin film[J]. Journal of Semiconductors, 2021, 42(12): 122805. doi: 10.1088/1674-4926/42/12/122805
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D L Gapale, P P Bardapurkar, S A Arote, S Dalvi, P Baviskar, R Y Borse, Humidity sensing properties of spray deposited Fe doped TiO2 thin film[J]. J. Semicond., 2021, 42(12): 122805. doi: 10.1088/1674-4926/42/12/122805.
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Humidity sensing properties of spray deposited Fe doped TiO2 thin film
DOI: 10.1088/1674-4926/42/12/122805
More Information
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Abstract
In the present work, ferrite (Fe) doped TiO2 thin films with different volume percentage (vol%) were synthesized using a spray pyrolysis technique. The effect of Fe doping on structural properties such as crystallite size, texture coefficient, microstrain, dislocation densities etc. were evaluated from the X ray diffratometry (XRD) data. XRD data revealed a polycrystalline anatase TiO2 phase for sample synthesized up to 2 vol% and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol% Fe doped TiO2. The crystalline size was observed to decrease with increase in Fe dopant vol% and also other structural parameters changes with Fe dopant percentage. In the present work, electrical resistance was observed to decrease with a rise in Fe dopant vol% and temperature of the sample. Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%. Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%. In the present paper, maximum sensitivity of about 88.7% for the sample synthesized with 2 vol% Fe doped TiO2 and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.-
Keywords:
- Fe doped TiO2,
- thin films,
- spray pyrolysis,
- humidity sensing
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References
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