Chin. J. Semicond. > 1999, Volume 20 > Issue 4 > 319-323
|

CONTENTS

Study on Interfacial SiO_2 Layer of Silicon Direct Bonding

He Jin , Wang Xin and Chen Xingbi

+ Author Affiliations

PDF

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2206 Times PDF downloads: 904 Times Cited by: 0 Times

    History

    Received: 20 August 2015 Revised: Online: Published: 01 April 1999

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 1999  >  20(4): 319-323
      He Jin, Wang Xin, Chen Xingbi. Study on Interfacial SiO_2 Layer of Silicon Direct Bonding[J]. 半导体学报(英文版), 1999, 20(4): 319-323.
      Citation:
      He Jin, Wang Xin, Chen Xingbi. Study on Interfacial SiO_2 Layer of Silicon Direct Bonding[J]. 半导体学报(英文版), 1999, 20(4): 319-323.
      shu

      • Received Date: 2015-08-20

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return