| Citation: |
Xue Chunlai, Yao Fei, Cheng Buwen, Wang Qiming. Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor[J]. Journal of Semiconductors, 2006, 27(11): 1955-1960.
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Xue C L, Yao F, Cheng B W, Wang Q M. Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor[J]. Chin. J. Semicond., 2006, 27(11): 1955.
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Effect of Substrate Structure on the Performance of a Silicon On-Chip Spiral Inductor
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Abstract
The effect of substrate structure on the performance of a spiral inductor is investigated with the 3D electromagnetic simulator HFSS.With variations in the substrate structure including substrate conductivity,permittivity,and thickness of the dielectric layer, the performance of the inductors is analyzed in detail.The simulation results indicate that the performance of the spiral inductor can be improved by lowering the conductivity of the substrate,increasing the thickness of the dielectric layer,and using a low k dielectric layer.In the mean time,some "design rules" are summarized form the results of this study.-
Keywords:
- silicon,
- spiral inductor,
- quality factor,
- substrate structure
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References
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Proportional views
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