Chin. J. Semicond. > 1990, Volume 11 > Issue 2 > 111-117
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抗反射条定域再结晶方法在SOI技术中的应用

杨晓军 , 马腾阁 , 张继盛 and 钱佩信

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(2): 111-117
      杨晓军, 马腾阁, 张继盛, 钱佩信. 抗反射条定域再结晶方法在SOI技术中的应用[J]. 半导体学报(英文版), 1990, 11(2): 111-117.
      Citation:
      杨晓军, 马腾阁, 张继盛, 钱佩信. 抗反射条定域再结晶方法在SOI技术中的应用[J]. 半导体学报(英文版), 1990, 11(2): 111-117.
      shu

      • Received Date: 2015-08-19

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