Chin. J. Semicond. > 1987, Volume 8 > Issue 6 > 657-659
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MeV He~+微束用于半导体集成电路的微区分析

朱沛然 , 刘家瑞 , 张敬平 and 殷士端

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    Received: 19 August 2015 Revised: Online: Published: 01 June 1987

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      Article Navigation >  Journal of Semiconductors  > 1987  >  8(6): 657-659
      朱沛然, 刘家瑞, 张敬平, 殷士端. MeV He~+微束用于半导体集成电路的微区分析[J]. 半导体学报(英文版), 1987, 8(6): 657-659.
      Citation:
      朱沛然, 刘家瑞, 张敬平, 殷士端. MeV He~+微束用于半导体集成电路的微区分析[J]. 半导体学报(英文版), 1987, 8(6): 657-659.
      shu

      • Received Date: 2015-08-19

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