Chin. J. Semicond. > 2004, Volume 25 > Issue 11 > 1453-1457
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Ni诱导非晶SiGe薄膜结晶

段鹏 , 屈新萍 , 刘萍 , 徐展宏 , 茹国平 and 李炳宗

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Key words: 金属诱导结晶, 非晶SiGe薄膜, 固相结晶

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(11): 1453-1457
      段鹏, 屈新萍, 刘萍, 徐展宏, 茹国平, 李炳宗. Ni诱导非晶SiGe薄膜结晶[J]. 半导体学报(英文版), 2004, 25(11): 1453-1457.
      Citation:
      段鹏, 屈新萍, 刘萍, 徐展宏, 茹国平, 李炳宗. Ni诱导非晶SiGe薄膜结晶[J]. 半导体学报(英文版), 2004, 25(11): 1453-1457.
      shu

      • Received Date: 2015-08-19

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