Chin. J. Semicond. > 1990, Volume 11 > Issue 10 > 780-785
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AIN膜及其在半导体光电器件中的应用

郭良 , 朱素珍 , 张霞 , 余金中 and 王德煌

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    Received: 19 August 2015 Revised: Online: Published: 01 October 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(10): 780-785
      郭良, 朱素珍, 张霞, 余金中, 王德煌. AIN膜及其在半导体光电器件中的应用[J]. 半导体学报(英文版), 1990, 11(10): 780-785.
      Citation:
      郭良, 朱素珍, 张霞, 余金中, 王德煌. AIN膜及其在半导体光电器件中的应用[J]. 半导体学报(英文版), 1990, 11(10): 780-785.
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      • Received Date: 2015-08-19

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