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										郭良, 朱素珍, 张霞, 余金中, 王德煌. AIN膜及其在半导体光电器件中的应用[J]. 半导体学报(英文版), 1990, 11(10): 780-785. 					 
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Article views: 2550 Times PDF downloads: 1148 Times Cited by: 0 Times
Received: 19 August 2015 Revised: Online: Published: 01 October 1990
| Citation: | 
										郭良, 朱素珍, 张霞, 余金中, 王德煌. AIN膜及其在半导体光电器件中的应用[J]. 半导体学报(英文版), 1990, 11(10): 780-785. 					 
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