Chin. J. Semicond. > 2004, Volume 25 > Issue 11 > 1491-1495
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基于自会聚多光束阵列的薄膜应力传感器

林晓春 , 郭艳艳 , 胡志敏 , 李存志 , 郑亚娥 and 安毓英

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Key words: 二元光学分束器, 薄膜应力, 现场传感器, 测量精度

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(11): 1491-1495
      林晓春, 郭艳艳, 胡志敏, 李存志, 郑亚娥, 安毓英. 基于自会聚多光束阵列的薄膜应力传感器[J]. 半导体学报(英文版), 2004, 25(11): 1491-1495.
      Citation:
      林晓春, 郭艳艳, 胡志敏, 李存志, 郑亚娥, 安毓英. 基于自会聚多光束阵列的薄膜应力传感器[J]. 半导体学报(英文版), 2004, 25(11): 1491-1495.
      shu

      • Received Date: 2015-08-19

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