Citation: |
Ye Zhizhen, Xu Weizhong, Zeng Yujia, Jiang Liu, Zhao Binghui, Zhu Liping, Lü Jianguo, Huang Jingyun, Wang Lei, Li Xianhang. Fabrication of ZnO Light-Emitting Diode by Using MOCVD Method[J]. Journal of Semiconductors, 2005, 26(11): 2264-2266.
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Ye Z Z, Xu W Z, Zeng Y J, Jiang L, Zhao B H, Zhu L P, Lü J, Huang J Y, Wang L, Li X H. Fabrication of ZnO Light-Emitting Diode by Using MOCVD Method[J]. Chin. J. Semicond., 2005, 26(11): 2264.
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Fabrication of ZnO Light-Emitting Diode by Using MOCVD Method
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Abstract
p-type zinc oxide (ZnO) thin films are grown by plasma-assisted metalorganic chemical vapor deposition (MOCVD).A ZnO homostructural light-emitting diode is fabricated by growing p-type ZnO epi-layer on n-type bulk ZnO wafer. The room temperature electroluminescence spectrum from violet to green regions is observed while the ZnO-LED is supplied with a DC voltage.-
Keywords:
- ZnO,
- LED,
- p-type doping,
- metalorganic chemical vapor deposition
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References
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Proportional views