Chin. J. Semicond. > 2000, Volume 21 > Issue 5 > 426-430
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用于先进 CMOS电路的 150 mm硅外延片外延生长(英文)

王启元 , 蔡田海 , 郁元桓 and 林兰英

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Key words: 硅, 外延生长

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    Received: 20 August 2015 Revised: Online: Published: 01 May 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(5): 426-430
      王启元, 蔡田海, 郁元桓, 林兰英. 用于先进 CMOS电路的 150 mm硅外延片外延生长(英文)[J]. 半导体学报(英文版), 2000, 21(5): 426-430.
      Citation:
      王启元, 蔡田海, 郁元桓, 林兰英. 用于先进 CMOS电路的 150 mm硅外延片外延生长(英文)[J]. 半导体学报(英文版), 2000, 21(5): 426-430.
      shu

      • Received Date: 2015-08-20

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