Chin. J. Semicond. > 1996, Volume 17 > Issue 6 > 421-427
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四极SIMS对Al_xGa_（1－x）As中Si的定量分析

姜志雄，查良镇，王佑祥，陈春华，陈新

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(6): 421-427
      姜志雄，查良镇，王佑祥，陈春华，陈新. 四极SIMS对Al_xGa_（1－x）As中Si的定量分析[J]. 半导体学报(英文版), 1996, 17(6): 421-427.
      Citation:
      姜志雄，查良镇，王佑祥，陈春华，陈新. 四极SIMS对Al_xGa_（1－x）As中Si的定量分析[J]. 半导体学报(英文版), 1996, 17(6): 421-427.
      shu

      • Received Date: 2015-08-18

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