Chin. J. Semicond. > 1993, Volume 14 > Issue 2 > 103-110
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AI/W/TiN/AI及AI/W/TiW/AI结构特性研究

武国英 , 郝一龙 , 徐立 , 张国炳 and 刘晓华

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(2): 103-110
      武国英, 郝一龙, 徐立, 张国炳, 刘晓华. AI/W/TiN/AI及AI/W/TiW/AI结构特性研究[J]. 半导体学报(英文版), 1993, 14(2): 103-110.
      Citation:
      武国英, 郝一龙, 徐立, 张国炳, 刘晓华. AI/W/TiN/AI及AI/W/TiW/AI结构特性研究[J]. 半导体学报(英文版), 1993, 14(2): 103-110.
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      • Received Date: 2015-08-20

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