Chin. J. Semicond. > 2002, Volume 23 > Issue 12 > 1267-1274
|

CONTENTS

亚50nm自对准双栅MOSFET的结构设计(英文)

殷华湘 and 徐秋霞

+ Author Affiliations

PDF

Key words: 双栅MOSFET, 结构设计, 侧墙效应, SCD

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2456 Times PDF downloads: 1044 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 December 2002

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2002  >  23(12): 1267-1274
      殷华湘, 徐秋霞. 亚50nm自对准双栅MOSFET的结构设计(英文)[J]. 半导体学报(英文版), 2002, 23(12): 1267-1274.
      Citation:
      殷华湘, 徐秋霞. 亚50nm自对准双栅MOSFET的结构设计(英文)[J]. 半导体学报(英文版), 2002, 23(12): 1267-1274.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return