| Citation: |
Li Lu, Shao Ye, Liu Junqi, Liu Fengqi, Wang Zhanguo. One-Dimensional InP-Based Photonic Crystal Quantum Cascade Laser Emitting at 5.36μm[J]. Journal of Semiconductors, 2008, 29(7): 1278-1280.
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Li L, Shao Y, Liu J Q, Liu F Q, Wang Z G. One-Dimensional InP-Based Photonic Crystal Quantum Cascade Laser Emitting at 5.36μm[J]. J. Semicond., 2008, 29(7): 1278.
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One-Dimensional InP-Based Photonic Crystal Quantum Cascade Laser Emitting at 5.36μm
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Abstract
An InP-based one-dimensional photonic crystal quantum cascade laser is realized.With photo lithography instead of electron beam lithography and using inductively coupled plasma etching,four-period air-semiconductor couples are defined as Bragg reflectors at one end of the resonator.The spectral measurement at 80K shows the quasi-continuous-wave operation with the wavelength of 5.36μm for a 22μm-wide and 2mm-long epilayer-up bonded device. -
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