Chin. J. Semicond. > 1988, Volume 9 > Issue 6 > 578-585
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工艺模型参数的优化提取和MICPOS工艺模拟程序

郑颖 and 夏武颖

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    Received: 19 August 2015 Revised: Online: Published: 01 June 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(6): 578-585
      郑颖, 夏武颖. 工艺模型参数的优化提取和MICPOS工艺模拟程序[J]. 半导体学报(英文版), 1988, 9(6): 578-585.
      Citation:
      郑颖, 夏武颖. 工艺模型参数的优化提取和MICPOS工艺模拟程序[J]. 半导体学报(英文版), 1988, 9(6): 578-585.
      shu

      • Received Date: 2015-08-19

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