Citation: |
Xiong Jijun, Mao Haiyang, Zhang Wendong, Xue Chenyang. Resonant Tunneling Diode Based Stress Measurement[J]. Journal of Semiconductors, 2008, 29(2): 324-328.
****
Xiong J J, Mao H Y, Zhang W D, Xue C Y. Resonant Tunneling Diode Based Stress Measurement[J]. J. Semicond., 2008, 29(2): 324.
|
Resonant Tunneling Diode Based Stress Measurement
-
Abstract
The output characteristics of InGaAs/AlAs resonant tunneling diodes (RTDs) changes as a function of external stress, and this meso-piezoresistive effect can be used to measure stress.In this paper, two RTD-based strategies to measure stress, resonance frequency measurement and RTD-Wheatstone bridge measurement, are discussed.The experimental results show that the piezoresistive sensitivity of the RTD-Wheatstone bridge can be configured within a range of 3 orders with different bias voltages, and the maximum piezoresistive sensitivity is 4.782e-9Pa-1. -
References
-
Proportional views