Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1428-1433
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CMOS工艺兼容的温湿度传感器

彭韶华 , 黄庆安 , 秦明 and 张中平

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Key words: 温湿度传感器, 聚酰亚胺, 电容型

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1428-1433
      彭韶华, 黄庆安, 秦明, 张中平. CMOS工艺兼容的温湿度传感器[J]. 半导体学报(英文版), 2005, 26(7): 1428-1433.
      Citation:
      彭韶华, 黄庆安, 秦明, 张中平. CMOS工艺兼容的温湿度传感器[J]. 半导体学报(英文版), 2005, 26(7): 1428-1433.
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      • Received Date: 2015-08-18

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