Chin. J. Semicond. > 1996, Volume 17 > Issue 2 > 93-97
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SIMOX材料的TEM研究

李映雪，奚雪梅，王兆江，张兴，王阳元，林成鲁

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    Received: 18 August 2015 Revised: Online: Published: 01 February 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(2): 93-97
      李映雪，奚雪梅，王兆江，张兴，王阳元，林成鲁. SIMOX材料的TEM研究[J]. 半导体学报(英文版), 1996, 17(2): 93-97.
      Citation:
      李映雪，奚雪梅，王兆江，张兴，王阳元，林成鲁. SIMOX材料的TEM研究[J]. 半导体学报(英文版), 1996, 17(2): 93-97.
      shu

      • Received Date: 2015-08-18

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