Chin. J. Semicond. > 1994, Volume 15 > Issue 9 > 638-642
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利用逐层生长技术制备硅薄膜的研究

陈茂瑞，陈坤基，姜建功，施伟华

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(9): 638-642
      陈茂瑞，陈坤基，姜建功，施伟华. 利用逐层生长技术制备硅薄膜的研究[J]. 半导体学报(英文版), 1994, 15(9): 638-642.
      Citation:
      陈茂瑞，陈坤基，姜建功，施伟华. 利用逐层生长技术制备硅薄膜的研究[J]. 半导体学报(英文版), 1994, 15(9): 638-642.
      shu

      • Received Date: 2015-08-19

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