Citation: |
Huai Yongjin, Han Zhengsheng. Design of a High Precision Array Pulse Sensor in TCM[J]. Journal of Semiconductors, 2008, 29(4): 701-705.
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Huai Y J, Han Z S. Design of a High Precision Array Pulse Sensor in TCM[J]. J. Semicond., 2008, 29(4): 701.
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Design of a High Precision Array Pulse Sensor in TCM
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Abstract
We designed a high-precision array pulse sensor for TCM (traditional Chinese medicine) that can directly transform pulse-pressure signal into electric current signal and is compatible with CMOS technology.We adopted a sacrifice-layer craft for the transistor gate.During testing,we found that the precision of the capacitor for the array sensor is 0.5fF/hPa when the pressure was changing within the range of 1.5kPa to 9.5kPa.More importantly,the output-current and the pressure of the sensor have a good linearity and exponential characteristics.According to the data from the experiment,we conclude that the characteristic of the response-current is related to the area of the MOS gate.-
Keywords:
- array senor,
- pulse senor,
- MOSFET gate,
- linearity
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References
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Proportional views