Chin. J. Semicond. > 1989, Volume 10 > Issue 3 > 192-197
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亚微米栅长调制掺杂场效应管(MODFET)的制造

杨玉芬 , 陈宗圭 and 张矩

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(3): 192-197
      杨玉芬, 陈宗圭, 张矩. 亚微米栅长调制掺杂场效应管(MODFET)的制造[J]. 半导体学报(英文版), 1989, 10(3): 192-197.
      Citation:
      杨玉芬, 陈宗圭, 张矩. 亚微米栅长调制掺杂场效应管(MODFET)的制造[J]. 半导体学报(英文版), 1989, 10(3): 192-197.
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      • Received Date: 2015-08-19

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