Chin. J. Semicond. > 1992, Volume 13 > Issue 11 > 683-689
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纳米硅薄膜结构分析

何宇亮 , 殷晨钟 , 程光煦 , 王路春 and 李齐

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(11): 683-689
      何宇亮, 殷晨钟, 程光煦, 王路春, 李齐. 纳米硅薄膜结构分析[J]. 半导体学报(英文版), 1992, 13(11): 683-689.
      Citation:
      何宇亮, 殷晨钟, 程光煦, 王路春, 李齐. 纳米硅薄膜结构分析[J]. 半导体学报(英文版), 1992, 13(11): 683-689.
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      • Received Date: 2015-08-19

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