| Citation: |
Cui Junpeng, Duan Yao, Wang Xiaofeng, Zeng Yiping. Quality of ZnO Expitaxial Film on m-Sapphire Substrate[J]. Journal of Semiconductors, 2007, 28(S1): 157-159.
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Cui J P, Duan Y, Wang X F, Zeng Y P. Quality of ZnO Expitaxial Film on m-Sapphire Substrate[J]. Chin. J. Semicond., 2007, 28(S1): 157.
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Quality of ZnO Expitaxial Film on m-Sapphire Substrate
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Abstract
ZnO epitaxial film was grown on m-sapphire substrate by home-made CVD equipment. The size of the film is micrometer range.The structure of the ZnOfilm is investigated by XRD and DXRD. The thickness of ZnO film and its section is observed by SEM. We also investigate the optical and electrical properties of ZnO film by PL spectrum and Hall respectirely.-
Keywords:
- m-sapphire,
- ZnO epitaxial film,
- micrometer size
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References
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Proportional views
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