Citation: |
苏九令, 包宗明, 王昌平, 陆桂华, 倪玫, 陈肯, 杨中柱, 黄正义, 吴树恩. 用光声谱法研究硅单晶中~(31)P~+离子注入[J]. 半导体学报(英文版), 1985, 6(2): 195-198.
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Received: 20 August 2015 Revised: Online: Published: 01 February 1985
Citation: |
苏九令, 包宗明, 王昌平, 陆桂华, 倪玫, 陈肯, 杨中柱, 黄正义, 吴树恩. 用光声谱法研究硅单晶中~(31)P~+离子注入[J]. 半导体学报(英文版), 1985, 6(2): 195-198.
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