Chin. J. Semicond. > 1990, Volume 11 > Issue 4 > 294-300
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BF_2~+注入束的沾污和对结深的影响

李金华 and 邹世昌

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    Received: 19 August 2015 Revised: Online: Published: 01 April 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(4): 294-300
      李金华, 邹世昌. BF_2~+注入束的沾污和对结深的影响[J]. 半导体学报(英文版), 1990, 11(4): 294-300.
      Citation:
      李金华, 邹世昌. BF_2~+注入束的沾污和对结深的影响[J]. 半导体学报(英文版), 1990, 11(4): 294-300.
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      • Received Date: 2015-08-19

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