Chin. J. Semicond. > 1993, Volume 14 > Issue 7 > 453-455
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一种结构改进了的硅基微静电马达

孙曦庆 , 李志坚 , 费圭甫 and 刘理天

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    Received: 20 August 2015 Revised: Online: Published: 01 July 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(7): 453-455
      孙曦庆, 李志坚, 费圭甫, 刘理天. 一种结构改进了的硅基微静电马达[J]. 半导体学报(英文版), 1993, 14(7): 453-455.
      Citation:
      孙曦庆, 李志坚, 费圭甫, 刘理天. 一种结构改进了的硅基微静电马达[J]. 半导体学报(英文版), 1993, 14(7): 453-455.
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      • Received Date: 2015-08-20

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