Chin. J. Semicond. > 2002, Volume 23 > Issue 8 > 840-845
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基于MOEMS技术的一种F-P光开关的设计与制作

徐杨 , 吴霁虹 , 刘理天 , 陈兢 and 董良

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Key words: F-P腔, 光开关, MOEMS

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    Received: 19 August 2015 Revised: Online: Published: 01 August 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(8): 840-845
      徐杨, 吴霁虹, 刘理天, 陈兢, 董良. 基于MOEMS技术的一种F-P光开关的设计与制作[J]. 半导体学报(英文版), 2002, 23(8): 840-845.
      Citation:
      徐杨, 吴霁虹, 刘理天, 陈兢, 董良. 基于MOEMS技术的一种F-P光开关的设计与制作[J]. 半导体学报(英文版), 2002, 23(8): 840-845.
      shu

      • Received Date: 2015-08-19

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