Chin. J. Semicond. > 1989, Volume 10 > Issue 10 > 769-774
|

CONTENTS

氢气放电无窗输出型光CVD非晶、微晶硅薄膜

郭述文 , 朱基千 , 谭淞生 and 王渭源

+ Author Affiliations

PDF

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2317 Times PDF downloads: 1120 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 October 1989

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 1989  >  10(10): 769-774
      郭述文, 朱基千, 谭淞生, 王渭源. 氢气放电无窗输出型光CVD非晶、微晶硅薄膜[J]. 半导体学报(英文版), 1989, 10(10): 769-774.
      Citation:
      郭述文, 朱基千, 谭淞生, 王渭源. 氢气放电无窗输出型光CVD非晶、微晶硅薄膜[J]. 半导体学报(英文版), 1989, 10(10): 769-774.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return