Chin. J. Semicond. > 2002, Volume 23 > Issue 4 > 414-418
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多晶硅薄膜晶体管源漏轻掺杂结构的优化设计

李牧菊 and 杨柏梁

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Key words: 薄膜晶体管, 热电子发射

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(4): 414-418
      李牧菊, 杨柏梁. 多晶硅薄膜晶体管源漏轻掺杂结构的优化设计[J]. 半导体学报(英文版), 2002, 23(4): 414-418.
      Citation:
      李牧菊, 杨柏梁. 多晶硅薄膜晶体管源漏轻掺杂结构的优化设计[J]. 半导体学报(英文版), 2002, 23(4): 414-418.
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      • Received Date: 2015-08-19

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