Chin. J. Semicond. > 1998, Volume 19 > Issue 12 > 936-939
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多孔硅对硅中缺陷的吸除效应

黄宜平 , 竺士炀 , 包宗明 , 何奕 , 钟回周 and 吴东平

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    Received: 18 August 2015 Revised: Online: Published: 01 December 1998

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      Article Navigation >  Journal of Semiconductors  > 1998  >  19(12): 936-939
      黄宜平, 竺士炀, 包宗明, 何奕, 钟回周, 吴东平. 多孔硅对硅中缺陷的吸除效应[J]. 半导体学报(英文版), 1998, 19(12): 936-939.
      Citation:
      黄宜平, 竺士炀, 包宗明, 何奕, 钟回周, 吴东平. 多孔硅对硅中缺陷的吸除效应[J]. 半导体学报(英文版), 1998, 19(12): 936-939.
      shu

      • Received Date: 2015-08-18

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