Chin. J. Semicond. > 1996, Volume 17 > Issue 12 > 932-935

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    Received: 18 August 2015 Revised: Online: Published: 01 December 1996

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      叶志镇,曹青,张侃,赵炳辉,李剑光,阙端麟,谢琪,雷震霖. 具有RHEED在线监控功能的超高真空CVD系统及3"硅片低温外延研究[J]. 半导体学报(英文版), 1996, 17(12): 932-935.
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      叶志镇,曹青,张侃,赵炳辉,李剑光,阙端麟,谢琪,雷震霖. 具有RHEED在线监控功能的超高真空CVD系统及3"硅片低温外延研究[J]. 半导体学报(英文版), 1996, 17(12): 932-935.

      • Received Date: 2015-08-18

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