Chin. J. Semicond. > 1996, Volume 17 > Issue 12 > 932-935
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具有RHEED在线监控功能的超高真空CVD系统及3＂硅片低温外延研究

叶志镇，曹青，张侃，赵炳辉，李剑光，阙端麟，谢琪，雷震霖

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    Received: 18 August 2015 Revised: Online: Published: 01 December 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(12): 932-935
      叶志镇，曹青，张侃，赵炳辉，李剑光，阙端麟，谢琪，雷震霖. 具有RHEED在线监控功能的超高真空CVD系统及3＂硅片低温外延研究[J]. 半导体学报(英文版), 1996, 17(12): 932-935.
      Citation:
      叶志镇，曹青，张侃，赵炳辉，李剑光，阙端麟，谢琪，雷震霖. 具有RHEED在线监控功能的超高真空CVD系统及3＂硅片低温外延研究[J]. 半导体学报(英文版), 1996, 17(12): 932-935.
      shu

      • Received Date: 2015-08-18

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