Chin. J. Semicond. > 1980, Volume 1 > Issue 2 > 167-167
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铝对硅外延层的吸杂现象

孙安纳 and 赵书鸾

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1980

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      Article Navigation >  Journal of Semiconductors  > 1980  >  1(2): 167-167
      孙安纳, 赵书鸾. 铝对硅外延层的吸杂现象[J]. 半导体学报(英文版), 1980, 1(2): 167-167.
      Citation:
      孙安纳, 赵书鸾. 铝对硅外延层的吸杂现象[J]. 半导体学报(英文版), 1980, 1(2): 167-167.
      shu

      • Received Date: 2015-08-20

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