Chin. J. Semicond. > 1995, Volume 16 > Issue 7 > 509-516
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微机械梁内应力测量方法的研究

邹泉波，刘理天，李志坚

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    鲍希茂, 张新宇, 柳承恩. 离子注入CO_2激光退火硅中的深能级缺陷[J]. 半导体学报(英文版), 1985, 6(1): 11-18.
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    Received: 19 August 2015 Revised: Online: Published: 01 July 1995

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      Article Navigation >  Journal of Semiconductors  > 1995  >  16(7): 509-516
      邹泉波，刘理天，李志坚. 微机械梁内应力测量方法的研究[J]. 半导体学报(英文版), 1995, 16(7): 509-516.
      Citation:
      邹泉波，刘理天，李志坚. 微机械梁内应力测量方法的研究[J]. 半导体学报(英文版), 1995, 16(7): 509-516.
      shu

      • Received Date: 2015-08-19

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